Fabrication of discrete track perpendicular media for high recording density

IEEE Transactions on Magnetics

Volumn 40, Issue 4 II, 2004, Pages 2510-2515

  Hattori, Kazuhiro ^a   Ito, Kuniyasu ^a   Soeno, Yoshikazu ^a   Takai, Mitsuru ^a   Matsuzaki, Mikio ^a  

^a TDK CORPORATION   (Japan)

Author keywords

90 nm track pitch; Discrete track media; Flattened surface; Flying stability

Indexed keywords

CARBON MONOXIDE; DENSITY (SPECIFIC GRAVITY); DRY ETCHING; ELECTRON BEAM LITHOGRAPHY; MAGNETIC ANISOTROPY; MAGNETIC FILMS; MAGNETIC PROPERTIES; REACTIVE ION ETCHING; SURFACE ROUGHNESS;

90-NM TRACK PITCH; DISCRETE SAMPLE MEDIA; FLATTENED SURFACE; FLYING STABILITY; VIBRATING SAMPLE MAGNETOMETER (VSM);

MAGNETIC RECORDING;

EID: 4444328767     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2004.832244     Document Type: Article

References (6)

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