Piezoresistive transduction in multilayer polycrystalline silicon resonators

Applied Physics Letters

Volumn 95, Issue 13, 2009, Pages

  Cross, J D ^a   Ilic, B R ^a   Zalalutdinov, M K ^b,c   Zhou, W ^a   Baldwin, J W ^c   Houston, B H ^c   Craighead, H G ^a   Parpia, J M ^a  

^a Department of Obstetrics Gynecology   (United States)

^b Global Strategies Group   (United States)

^c NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC BREAKDOWNS; GAUGE FACTORS; INTER-LAYER DIELECTRICS; INTERLAYER MATERIALS; MECHANICAL MOTIONS; MICROMECHANICAL RESONATOR; NANO SCALE; OUT-OF-PLANE; PIEZO-RESISTIVE; PIEZORESISTOR; POLY-CRYSTALLINE SILICON; POLYCRYSTALLINE SILICON LAYERS; THERMAL SILICON; TRANSDUCING;

BACTERIOPHAGES; FILM PREPARATION; POLYSILICON; SILICA; SILICON NITRIDE;

RESONATORS;

EID: 70349667477     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3241077     Document Type: Article

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