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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 5, 2009, Pages 2161-2165

Nonlinear large deflection of nanopillars fabricated by focused ion-beam induced chemical vapor deposition using double-cantilever testing

(4) Tanaka, Hiro a Shinkai, Masaki a Shibutani, Yoji a Kogo, Yasuo b

a OSAKA UNIVERSITY (Japan)

b TOKYO UNIVERSITY OF SCIENCE (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING RIGIDITY; CANTILEVER BENDING; ELECTRON BEAM DEPOSITIONS; LARGE DEFLECTION; LARGE DEFORMATIONS; LINEAR RESPONSE; LOAD-DEFLECTION CURVE; NANO-SIZED; NANOPILLARS; NANOSCALED MATERIALS; RESONANCE VIBRATIONS; SCANNING ELECTRON MICROSCOPE; TENSILE DEFORMATION;

AMORPHOUS CARBON; ATOMIC FORCE MICROSCOPY; BENDING TESTS; CHEMICAL MODIFICATION; CHEMICAL VAPOR DEPOSITION; DEFLECTION (STRUCTURES); ION BEAMS; MATERIALS TESTING; NANOCANTILEVERS; PLANTS (BOTANY); SCANNING ELECTRON MICROSCOPY; VAPORS;

BENDING (DEFORMATION);

EID: 70349656776 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.3212912 Document Type: Article

Times cited : (5)

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