Inelastic deformability of nanopillar by focused-ion-beam chemical vapor deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 1, 2008, Pages 201-205

  Shibutani, Yoji ^a   Yoshioka, Toshiyuki ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON; BOND STRENGTH (CHEMICAL); CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; FOCUSED ION BEAMS; PLASTIC DEFORMATION;

BOND STRETCHING; ELEMENTARY COMPOSITE THEORY; INTERNAL STRUCTURE ANALYSIS; RESONANCE VIBRATION TEST;

NANOSTRUCTURED MATERIALS;

EID: 38849193539     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2830683     Document Type: Article

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