Dual servo control of a high-tilt 3-DOF microparallel positioning platform

IEEE/ASME Transactions on Mechatronics

Volumn 14, Issue 5, 2009, Pages 616-625

  Seo, Tae Won ^a   Kang, Deuk Soo ^b   Kim, Hwa Soo ^c   Kim, Jongwon ^a  

^a Seoul National University   (South Korea)

^b Seoul National University   (South Korea)

^c University of Minnesota   (United States)

Author keywords

Dual servo control; Dynamic modeling; Microparallel positioning platform; Robust control

Indexed keywords

3 DEGREES OF FREEDOM; 3-DOF MOTIONS; ANTI-WINDUP; DUAL SERVO CONTROL; DUAL STAGE; DUAL STAGE SYSTEMS; DUAL-STAGE SERVO SYSTEMS; DYNAMIC MODELING; FEED-FORWARD COMPENSATOR; GAIN SCHEDULER; LINEAR SENSOR; MASTER-SLAVE; MICROPARALLEL POSITIONING PLATFORM; MIXED-SENSITIVITY; MULTI-INPUT MULTI-OUTPUT; PARALLEL MACHINE; POSITIONING ACCURACY; PRECISE POSITIONING; SERVO CONTROL; SERVO-CONTROLLERS; SUBMICROMETER ACCURACY; SYSTEM IDENTIFICATIONS; TRACKING PERFORMANCE;

ACTUATORS; MULTIPLEXING; PNEUMATIC CONTROL EQUIPMENT; ROBUST CONTROL;

CONTROLLERS;

EID: 70349254570     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2008.2011053     Document Type: Article

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