On the coarse/fine dual-stage manipulators with robust perturbation compensator

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 1, Issue , 2001, Pages 121-126

  Kwon, S ^a   Wan Kyun Chung, ^a   Youm, Y ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALGORITHMS; FEEDBACK CONTROL; MOTION CONTROL; PERTURBATION TECHNIQUES; POSITION CONTROL; ROBUSTNESS (CONTROL SYSTEMS);

PERTURBATION COMPENSATORS;

MANIPULATORS;

EID: 0034877732     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. Track following controller design for a compound disk drive actuator
2. Track following controller design of MEMS based dual-stage servos in magnetic hard disk drives
3. Two-stage actuation for improved accuracy of contouring
4. An utraprecision stage for alignment of wafers in advanced microlithography
5. Robust and time-optimal control strategy for coarse/fine dual stage manipulators
6. The macro/micro manipulator: An improved architecture for robot control
7. Inertial properties in robotic manipulation: An object-level framework
8. A time delay controller for systems with unknown dynamics
9. Motion control for advanced mechatronics
10. High-performance robust motion control of machine tools: An adaptive robust control approach and comparative experiments