SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Photopolymer Science and Technology

Volumn 22, Issue 1, 2009, Pages 117-122

Underlayer designs to enhance EUV resist performance

(4) Guerrero, Douglas J a Xu, Hao a Mercado, Ramil a Blackwell, James b

a BREWER SCIENCE INC (United States)

b INTEL CORPORATION (United States)

Author keywords

EUV; PAG; Photoacid generator; Sensitizer; Underlayer

Indexed keywords

EID: 70249124604 PISSN: 09149244 EISSN: 13496336 Source Type: Journal
DOI: 10.2494/photopolymer.22.117 Document Type: Article

Times cited : (13)

References (15)

1
- 70249106238
- October
- S. Wurm, Solid State Technology, October (2006).
- (2006) Solid State Technology
- Wurm, S.¹

2
- 0036350234
- Y3 2. 1-Y3. 2. 10
- J. L. Cobb, R. L. Brainard, D. J. O'Connell, and P. M. Dentinger, Mat. Res. Soc. Symp. Proc. 705. (2002), Y3.2.1-Y3.2.10.
- (2002) Mat. Res. Soc. Symp. Proc.
- Cobb, J.L.¹ Brainard, R.L.² O'Connell, D.J.³ Dentinger, P.M.⁴

3
- 0036118745
- E. M. Gullikson, C. Cerjan, D. G. Stearns, P. B. Mirkarimi, D. W. Sweeney, J. Vac. Sci. Technol. B, 20, (2002), 81-86.
- (2002) J. Vac. Sci. Technol. B , vol.20 , pp. 81-86
- Gullikson, E.M.¹ Cerjan, C.² Stearns, D.G.³ Mirkarimi, P.B.⁴ Sweeney, D.W.⁵

4
- 84960259042
- SPIE press, Bellingham, WA
- V. Bakshi, "EUV sources for lithography," SPIE press, Bellingham, WA (2005).
- (2005) EUV sources for lithography
- Bakshi, V.¹

5
- 2542495970
- P. B. Mirkarimi, E. Spiller, S. L. Baker, V. Sperry, D. G. Stearns, E.M. Gullikson, J. Microlith., Mcrofab., Microsyst. 3,(2004), 139-145.
- (2004) J. Microlith., Mcrofab., Microsyst. , vol.3 , pp. 139-145
- Mirkarimi, P.B.¹ Spiller, E.² Baker, S.L.³ Sperry, V.⁴ Stearns, D.G.⁵ Gullikson, E.M.⁶

6
- 70249122569
- www.itrs.net/Links/20071TRS/2007_Chapters/2007_Lithography.pdf

7
- 3843087239
- R. L. Brainard, P. Trcfonas J. H. Lammers, C. A. Cutler, J. F. Mackevich, A. Trefonas, S. A. Robertson, Proc. SPIE, 5374 (Pt. 1), (2004), 74-85.
- (2004) Proc. SPIE , vol.5374 , Issue.PART 1 , pp. 74-85
- Brainard, R.L.¹ Trcfonas, P.² Lammers, J.H.³ Cutler, C.A.⁴ Mackevich, J.F.⁵ Trefonas, A.⁶ Robertson, S.A.⁷

8
- 35148886236
- 651911/1-65191 I/I0.
- G. M. Gallatin, P. Naulleau, R. Brainard, Proc. SPIE, 6519, (2007), 651911/1-65191 I/I0.
- (2007) Proc. SPIE , vol.6519
- Gallatin G., M.¹ Naulleau, P.² Brainard, R.³

9
- 3843090432
- G. M. Schmid, M. D. Stewart, C. Wang, D. B. Vogt, V. M. Prabhu, E. K. Lin, C. G. Willson, Proc. SPIE, 5376, (2004), 333-342.
- (2004) Proc. SPIE , pp. 333-342
- Gallatin, G.M.¹ Naulleau, P.² Brainard, R.³ Schmid, G.M.⁴ Stewart, M.D.⁵ Wang, C.⁶ Vogt, D.B.⁷ Prabhu, V.M.⁸ Lin, E.K.⁹ Willson, C.G.¹⁰

10
- 50149105199
- D. J. Guerrero, C. Beaman, R. Sakamoto, T. Endo, and B-C. Ho, J. of Photopolym. Sci. Technol. 21(3), (2008), 541-455.
- (2008) J. of Photopolym. Sci. Technol. , vol.21 , Issue.3 , pp. 541-455
- Guerrero, D.J.¹ Beaman, C.² Sakamoto, R.³ Endo, T.⁴ Ho, B.-C.⁵

11
- 70249129955
- Lake Tahoe, CA, Sept. 28-Oct. 1
- D. J, Guerrero, C. Beaman, R. Sakamoto, T. Endo, and B-C. Ho, International EUVL Symposium [SEMATECH], Lake Tahoe, CA, Sept. 28-Oct. 1,2008.
- (2008) International EUVL Symposium [SEMATECH]
- Guerrero, D.J.¹ Beaman, C.R.² Sakamoto, T.³ Endo, T.⁴ Ho, B.-C.⁵

12
- 79959345348
- 69211F
- T. Wallow, C. Higgins, R. L. Brainard, K.Petrillo, W. Montgomery, C. Koay, G. Denbeaux, O. Wood, Y. Wei, Proc. SPIE, 6921, (2008), 69211F.
- (2008) Proc. SPIE
- Wallow, T.¹ Higgins, C.² Brainard, R.L.³ Petrillo, K.⁴ Montgomery, W.⁵ Koay, C.⁶ Denbeaux, G.⁷ Wood, O.⁸ Wei, Y.⁹

13
- 79959332235
- 69213O
- A. Ma, J. Park, K. Dean, S. Wurm, P. Naulleau, Proc. SPIE, 6921, (2008), 69213O.
- (2008) Proc. SPIE , vol.6921
- Ma, A.¹ Park, J.² Dean, K.³ Wurm, S.⁴ Naulleau, P.⁵

14
- 57249104988
- M. Chandhok, K. Frasure, E.S. Putna, T. Younkin, W. Rachmady, U. Shah, W. Yueh, J. Vac. Sci. Technol. B, 26, (2008), 2265.
- (2008) J. Vac. Sci. Technol B , vol.26 , pp. 2265
- Chandhok, M.¹ Frasure, K.² Putna, E.S.³ Younkin, T.⁴ Rachmady, W.⁵ Shah, U.⁶ Yueh, W.⁷

15
- 37149038003
- T. Kozawa, Tagawa S. J. Vac. Sci. Technol. B, 25, 2007, 2481.
- (2007) J. Vac. Sci. Technol. B , vol.25 , pp. 2481
- Kozawa, T.¹ Tagawa, S.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.