Gap length effect on electron energy distribution in capacitive radio frequency discharges

Applied Physics Letters

Volumn 91, Issue 22, 2007, Pages

  You, S J ^a   Kim, S S ^b   Kim, Jung Hyung ^a   Seong, Dae Jin ^a   Shin, Yong Hyeon ^a   Chang, H Y ^c  

^a Korea Research Institute of Standards and Science   (South Korea)

^b National Fusion Research Institute   (South Korea)

^c Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRIC FIELDS; ENERGY GAP; MAXWELL EQUATIONS;

ELECTRON ENERGY DISTRIBUTION; GAP SIZE; NONLOCAL KINETIC THEORY; RADIO FREQUENCY DISCHARGES;

ELECTRON ENERGY LEVELS;

EID: 36549029202     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2805032     Document Type: Article

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