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Volumn 25, Issue 17, 2009, Pages 9797-9803

Photoimaging with singlet oxygen at the solid-air interface

Author keywords

[No Author keywords available]

Indexed keywords

EXPERIMENTAL CONDITIONS; MASK DIMENSIONS; MINIMUM FEATURE SIZES; OXYGEN DIFFUSION; PHOTOIMAGING; SINGLET OXYGEN; SOLID-AIR INTERFACE; THICKNESS OF THE FILM;

EID: 69949158499     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la9008976     Document Type: Article
Times cited : (17)

References (65)
  • 1
    • 0004093537 scopus 로고
    • ACS Professional Reference Book; American Chemical Society: Washington, DC Chapter 3
    • (a) Willson, C. G. Introduction to Microlithography, 2nd ed.; ACS Professional Reference Book; American Chemical Society: Washington, DC, 1994; Chapter 3.
    • (1994) Introduction to Microlithography, 2nd Ed.
    • Willson, C.G.1
  • 21
    • 0003899626 scopus 로고
    • Foote, C. S., Valentine, J. S., Greenberg, A., Liebmann, J. F., Eds. Chapman and Hall: London
    • (a) Foote, C. S., Valentine, J. S., Greenberg, A., Liebmann, J. F., Eds. Active Oxygen in Chemistry; Chapman and Hall: London, 1995.
    • (1995) Active Oxygen in Chemistry
  • 24
    • 0034680706 scopus 로고    scopus 로고
    • 2 ene reaction
    • 2 ene reaction, see: (a) Clennan, E. L. Tetrahedron 2000, 56, 9151-9179.
    • (2000) Tetrahedron , vol.56 , pp. 9151-9179
    • Clennan, E.L.1
  • 42
    • 69949133569 scopus 로고
    • Schaefer, K., Ed.; Landolt-Börnstein; Springer: Berlin
    • Andrussow, L. In Transport Phenomena-Viscosity and Diffusion; Schaefer, K., Ed.; Landolt-Börnstein; Springer: Berlin, 1969; Vol.II-5a, pp 516-562.
    • (1969) Transport Phenomena-Viscosity and Diffusion , vol.2-5 A , pp. 516-562
    • Andrussow, L.1
  • 54
    • 69949149259 scopus 로고
    • IRRAS is usually designated to study monolayers. In this study we measure on thin films and no selection rules apply. For general literature, Clark, R. J. H., Hester, R. E., Eds.; Wiley: New York, Chapter 8
    • IRRAS is usually designated to study monolayers. In this study we measure on thin films and no selection rules apply. For general literature, see: Bradshaw, A. M.; Schweizer, E. In Spectroscopy of Surfaces; Clark, R. J. H., Hester, R. E., Eds.; Wiley: New York, 1988; Chapter 8.
    • (1988) Spectroscopy of Surfaces
    • Bradshaw, A.M.1    Schweizer, E.2
  • 58
    • 0000856833 scopus 로고
    • For methods to measure gas diffusion coefficients
    • For methods to measure gas diffusion coefficients, see: (a) Hormats, E. I.; Unterleitner, F. C. J. Phys. Chem. 1965, 69, 3677-3681.
    • (1965) J. Phys. Chem. , vol.69 , pp. 3677-3681
    • Hormats, E.I.1    Unterleitner, F.C.2
  • 62
    • 69949171354 scopus 로고
    • Schaefer, K., Ed.; Landolt-Börnstein; Springer: Berlin
    • Andrussow, L. In Transport Phenomena-Viscosity and Diffusion; Schaefer, K., Ed.; Landolt-Börnstein; Springer: Berlin, 1969; Vol.II-5a, pp 633-639.
    • (1969) Transport Phenomena-Viscosity and Diffusion , vol.2-5 A , pp. 633-639
    • Andrussow, L.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.