Optical constants of silicon carbide deposited with emerging PVD techniques

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7360, Issue , 2009, Pages

  Monaco, Gianni ^a,b   Suman, M ^a,b   Pelizzo, M G ^a,b   Nicolosi, P ^a,b  

^a UNIVERSITY OF PADOVA   (Italy)

^b CNR   (Italy)

Author keywords

EUV optics; Optical constants; Pulsed electron deposition; Pulsed laser deposition; Silicon carbide; Thin films

Indexed keywords

BEAM LINES; CARBON RICH; DEPOSITED FILMS; DEPOSITION PROCESS; EUV OPTICS; IN-BUILDINGS; NORMAL INCIDENCE; PULSED ELECTRON DEPOSITION; REFLECTIVE MATERIALS; SI SUBSTRATES; SIC THIN FILMS; SILICON SUBSTRATES; SOFT X-RAY; SOFT X-RAY OPTICS; TRIESTE;

CARBON FILMS; CHEMICAL VAPOR DEPOSITION; DEPOSITION; ELECTRON SOURCES; INTEGRATED OPTOELECTRONICS; LASERS; OPTICAL CONSTANTS; PHOTODEGRADATION; PULSED LASER DEPOSITION; REFLECTION; SILICON CARBIDE; SPACECRAFT OBSERVATORIES; STOICHIOMETRY; SUBSTRATES; THIN FILMS; ULTRAVIOLET DEVICES;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 69949112301     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.820684     Document Type: Conference Paper

References (35)

1. Choyke, W J, et al. Silicon-carbide diffraction grating for the vacuum ultraviolet: feasibility. Appl. Opt. 1977, Vol.16 (8), pp. 2013-2014.
2. R.A.M. Keski-Kuha, J.F. Osantowsky, D.B. Levinton, Timo T. Saha, G.A. Wrigth, R.A. Boucarut, C.M. Fleetwood, T.J. Madison. "Chemical vapour deposited silicon carbide mirrors for extreme ultraviolet applications". Opt. Eng. 1997, Vol.36(1), pp. 157-161.
3. J.S. Goela, L.E. Burns, R.L. taylor. "Monolithic material fabrication by chemical vapour deposition" Journal of Mat. Science. 1988, Vol.23, pp. 4331-4339.
4. David L.Windt, W. C. Cash, M. Scott, P. Arendt, B. Newnam, R.F. Fisher, A.B. Swartzlander, M.Pinneo and P.Z. Tazacs. "Optical constant for thin film of C, diamond, Al, Si and CVD-SiC from 24 Å to 1216Å". Appl. Opt. 1988, Vol.27, pp. 279-295.
5. R. A. M. Keski-Kuha, J. Osantowski, A. R. Toft, and W. D.Partlow. "Grazing incidence reflectance of SiC films produced by plasma-assisted chemical vapor deposition". Appl. Optic. 1988, Vol.27, p. 1499.
6. M. Yanagihara, J. Cao, M. Yamamoto, T. Namioka, S. Sato, T. Koide, S. Takeda, and A. Iijima. "Optical constants of SiC mirrors produced by different methods for photons of 60-1000 eV". Rev. Sci. Instrum. 1989, Vol.60 (1), pp. 2030-2033.
7. R. A. M. Keski-Kuha, C. M. Fleetwood and J. Robichaud. "Performance of high-density cast silicon carbide in the extreme ultraviolet". Appl. Opt. 1997, Vol.36, pp. 4409-4410.
8. J. S. Goela, M. A. Pickering, R. L. Taylor, B. W. Murray, and A. Lompado. "Properties of chemical vapor deposited SiC for optics applications in severe environments". Appl. Opt. 1991, Vol.30, pp. 3166-3175.
9. H.Herzig, A.R. Toft, C. M. Fleetwood Jr. "Long duration orbital effects on optical coating materials". Appl. Opt. 1993, Vols. 32-10, p. p. 1798.
10. R. A. M. Keski-Kuha, G. M. Blumenstock, C. M. Fleetwood, and D. R. Schmit. "Effects of space exposure on ionbeamdepositedsilicon- carbide and boron-carbide coatings, ". Appl. Opt. 1988, Vol.37, pp. 8038-8042.
11. Wilhelm, K., W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M.C.E. Huber, S.D. Jordan, A.I. Poland, R.J. Thomas, M. Kuhne, J.G. Timothy, and O.H.W. Siegmund, SUMER - Solar Ultraviolet Measurements of Emitted R. "SUMER - Solar Ultraviolet Measurements of Emitted Radiation". Solar Physics. 1995, Vol.162, pp. 189-231.
12. David J. Sahnow, Scott D. Friedman, William R. Oegerle, Henry W. Moos, James C. Green, Oswald H. Siegmund "Design and predicted performance of the Far Ultraviolet Spectroscopic Explorer" .. 1996. Proc. SPIE . Vol.2807.
13. J. B. Kortright and D.L. Windt, "Amorphous silicon carbidecoatings for EUV optics". Appl. Opt. 1988, Vol.27, pp. 2841-2846.
14. R. A. M. Keski-Kuha, J. I. Larruquert. "Reflectance measurements and optical constants in the extreme ultraviolet for thin films of ion-beam-deposited SiC, Mo, Mg2Si, and InSb and of evaporated Cr". Appl. Opt. 2000, Vol.39, pp. 2772-2781.
15. D.Garoli, F. Frassetto, G. Monaco, P. Nicolosi, M.-G. Pelizzo, F. Rigato, V. Rigato, A. Giglia, S. Nannarone. "Reflectance measurements and optical constants in the extreme ultraviolet-vacuum ultraviolet regions for SiC with a different C/Si ratio". Appl. Opt. 2006, Vol.45(22), pp. 5642-5650.
16. Mónica Fernández-Perea, Juan I. Larruquert, José A. Aznárez, and José A. Méndez. "Transmittance and reflective coatings for the 50-200 nm spectral range" Proc. SPIE, Vol.6317, 63170L (2006).
17. Lebow Company. LEBOW databook, http://www.lebowcompany.com/.
18. Roy, R.A. Messier R. "Preparation of physical structure relation in SiC Sputtered films". Journal of vacuum science technology A. 1984, Vol.2, p. 312.
19. Zabinski, Josekutty J. Nainaparampil and Jeffrey S. "Crystalline SiC thin films deposited at room temperature using pulsed laser ablation of graphite and magnetron sputtering of silicon". J. Vac. Sci. Technol. A. 1999, Vol.17(3), p. 909.
20. J. S. Pelt, M. E. Ramseya, S. M. Durbin. "Characterization of crystalline SiC films grown by pulsed laser deposition". Thin Solid Films. 2000, Vol.371, pp. 72-79.
21. D. L. Windt, S. Donguy, J. Seely, and B. Kjornrattanawanich. "Experimental comparison of extreme-ultraviolet multilayers for solar physics". Appl. Opt. 2004, Vol.43, pp. 1835-1848.
22. S. Zuccon, D. Garoli, M.G. Pelizzo, P. Nicolosi, S. Fineschi, D. Windt. Multilayer Coatings for multiband spectral observations. Proc. 6th Internat. Conf. on Space Optics. 2006.
23. Gianni Monaco, M. Gastaldi, P. Nicolosi, M.G. Pelizzo, E. Gilioli, S. Rampino, S. Agnoli, G. Granozzi and N. Manuzzato "Silicon carbide thin films for EUV and soft X-ray application" European Physical Journal Special Topics, in press.
24. Kazuya Shimoda, Joon-Soo Park, Tatsuya Hinoki, Akira Kohyama, Appl. Surf. Sci. 253, (2007) 9450-9456.
25. D.B. Chrisey, G.K. Hubler, "Pulsed Laser Deposition of Thin Films", John Wiley and Sons (1994).
26. R.Jordan, D.Cole, J.G.Lunney. "Pulsed laser deposition of particulate-free films using a curved magnetic filter". Appl.Surf.Sci. 1997, Vols. 109/110,, pp. 403-407.
27. S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, "The BEAR beamline at ELETTRA, " AIP Conf. Proc. 705, 450-453 (2004).
28. M. Suman, M. G. Pelizzo, David L. Windt, G. Monaco, S. Zuccon and P. Nicolosi, "Innovative design of EUV multilayer reflective coating for improved spectral filtering in solar imaging"; in Proceedings of the International Conference on Space Optics (ICSO), ESA-SP (European Space Agency, 2008).
29. http://www-cxro.lbl.gov/.
30. Elettra Website: http://www.elettra.trieste.it.
31. M.-G. Pelizzo, F. Frassetto, P. Nicolosi, A. Giglia, N. Mahne, and S. Nannarone. "Polarization and higher-order content measurement of a soft-x-ray monochromatized beam with Mo-Si multilayers". Appl. Opt. 2006, Vols. 45,, pp. 1985-1992.
32. 2Si, and InSb and of evaporated Cr, " Appl. Opt. 39, 2772-2781 (2000).
33. G. Monaco, D. Garoli, R. Frison, V. Mattarello, P. Nicolosi, M. G. Pelizzo, V. Rigato, L. Armelao, A. Giglia, S. Nannarone, " Optical constants in the EUV soft x-ray (5÷152 nm) spectral range of B4C thin films deposited by different deposition techniques", Proceedings SPIE, 6317, (2006).
34. Windt, David L. "IMD-Software for modeling the optical properties of multilayer" Computers in Physics, 1988, Vol.12, 4, pp. 360-370.
35. M. Lampton, B. Margon and S. Bowyer, "Parameter estimation in X-ray astronomy", Ap. J., 208, 177 (1976).