Silicon carbide thin films for EUV and soft X-ray applications

European Physical Journal: Special Topics

Volumn 169, Issue 1, 2009, Pages 159-165

  Monaco, G ^a   Gastaldi, M ^a   Nicolosi, P ^a   Pelizzo, M G ^a   Gilioli, E ^b   Rampino, S ^b   Bissoli, F ^b   Pattini, F ^b   Agnoli, S ^a   Granozzi, G ^a   Manuzzato, N ^a  

^a UNIVERSITY OF PADOVA   (Italy)

^b IMEM CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 65649105120     PISSN: 19516355     EISSN: 19516401     Source Type: Journal    
DOI: 10.1140/epjst/e2009-00987-6     Document Type: Conference Paper

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