Optical constants in the EUV Soft x-ray (5 ÷152 nm) spectral range of B4C thin films deposited by different deposition techniques

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6317, Issue , 2006, Pages

  Monaco, G ^a   Garoli, D ^a   Frison, R ^a   Mattarello, V ^b   Nicolosi, P ^a   Pelizzo, M G ^a   Rigato, V ^b   Armelao, L ^a   Giglia, A ^c   Nannarone, S ^c  

^a UNIVERSITY OF PADOVA   (Italy)

^b LABORATORI NAZIONALI DI LEGNARO   (Italy)

^c SINCROTRONE TRIESTE   (Italy)

Author keywords

B4c; E beam; EUV soft X; Magnetron sputtering; Multilayer; Optical coatings; Optical constants; PLD

Indexed keywords

ATOMIC FORCE MICROSCOPY; BORON COMPOUNDS; DEPOSITION; LIGHT REFLECTION; MULTILAYERS; OPTICAL COATINGS; X RAY DIFFRACTION ANALYSIS;

E-BEAM EVAPORATION; EXTREME ULTRAVIOLET REGION (EUV); OPTICAL CONSTANTS;

THIN FILMS;

EID: 33750578599     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.684088     Document Type: Conference Paper

References (24)

1. D. L. Windt, S. Donguy, J. F. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, "EUV multilayers for solar physics", Proc. SPIE 5168, 1-11, (2004).
2. G.M. Blumenstock, Ritva A. M. Keski-Kuha, "Ion-beam-deposited boron-carbide coatings for the extreme ultraviolet", Appl. Opt. 33(25), 5962-5963, (1994).
3. 4C multilayer coatings at estreme ultra-violet region; comparison with standard Mo/Si coatings" Proc. SPIE, 5901, In print.
4. 4C/Si multilayers deposited by rf-magnetron sputtering'', Appl. Surf. Sci, 238(15), 262-268, (2004).
5. 4C in the extreme ultraviolet'' Appl. Opt., 39(10), 1537-1540, (2000).
6. B.J. Kent, B. M. Swinyard, H.-J. Maier and D. Frischke, "Boron carbide as oxygen protection for the Lexan-Carbon filter on the ROSAT Wide Field Camera", Proc. SPIE 1546, 312-321, (1991).
7. W. J. Pan, J. Sun, H. Ling, N. Xu, Z. F. Ying and J. D. Wu, "Preparation of thin films of carbon-based compounds", Appl. Surf. Sci, 218, 298-305, (2003).
8. F. Kokai, M.Taniwaki, K.Takahashi, A.Goto, M.Ishihara, K.Yamamoto and Y. Koga, "Laser ablation of boron carbide: thin-film deposition and plume analysis", Diam. Rel. Mat., 10(3), 1412-1416, (2001).
9. F. Kokai, M. Taniwaki, M. Ishihara, Y. Koga, "Effect of laser fluence on the deposition and hardness of boron carbide thin film" Appl. Phys. A: Materials Science & Processing, 74, 533-536, (2002).
10. D.B. Chrisey, G.K. Hubler, Pulsed Laser Deposition of Thin Films, John Wiley & Sons (1994).
11. David L. Windt, Webster C. Cash, Jr., M. Scott, P. Arendt, B. Newnam, R. F. Fisher, A. B. Swartzlander, "Optical constants for thin films of Ti, Zr, Mb, Mo, Ru, Rh, Pd, Ag, Hf, Ta, W, Re, Ir, Os. Pt. and Au from 24 Å to 1216 Å", Appl. Opt. 27(2), 246-278, (1988).
12. J. S. Pelta, M. E. Ramseya, S. M. Durbin, "Characterization of crystalline SiC films grown by pulsed laser deposition", Thin Solid Films 371, 72-79, (2000).
13. R.K. Singh, J. Narayan, "Pulsed-laser evaporation technique for deposition of thin films: Physics and theoretical model", Phys. Rev. B 41, 8843-8859, (1990).
14. R. Kelly, A. Miotello, "Comments on explosive mechanisms of laser sputtering", Appl. Surf. Sci. 96-98 205 (1996);
15. K.L. Saenger, "On the origin of spatial nonuniformities in the composition of pulsed-laser-deposited films", J. Appl. Phys. 70, 5629-5635, (1991).
16. A. Mele, A. Giardini Guidoni, R. Kelly, "Modeling of laser induced plasma, spectroscopic and time of flight experiments in pulsed laser deposition", Appl. Surf. Sci. 96-98, 102-111, (1996).
17. W. Kautek, B. Roas, L. Shultz, "Formation of Y-Ba-Cu-oxide thin films by pulsed laser deposition: A comparative study in the UV, visible and IR range", Thin Solid Films 191, 317-334, (1990).
18. 7-x films", Thin Solid Films 214, 223-228, (1992).
19. E. György, I.N. Mihailescu, M. Kompitsas, A. Giannoudakos, "Particulates-free Ta thin films obtained by pulsed laser deposition: the role of a second laser in the laser-induced plasma heating", Appl. Surf. Sci.195, 270-276, (2002).
20. R. Jordan, D. Cole, J.G. Lunney, "Pulsed laser deposition of particulate-free thin films using a curved magnetic filter", Appl. Surf. Sci. 109/110, 403-407, (1997).
21. D. Garoli, G. Monaco, F. Frassetto, M.-G. Pelizzo, P. Nicolosi, L. Armelao, V. Mattarello, and V. Rigato,"Thin film and multilayer coating development for the extreme ultraviolet spectral region", Rad. Phys. Chem., In Press.
22. L.G. Jacobsohn, R.K. Schulze, M.E.H. Maia da Costa and M. Nastasi, "X-ray photoelectron spectroscopy investigation of boron carbide films deposited by sputtering", Surf. Sci. 572 (2-3), 418-424, (2004).
23. J.M. Bennet, L. Mattson, Introduction to Surface Roughness and Scattering, Optical Society of America (1989).
24. D.Garoli, F. Frassetto, G. Monaco, P. Nicolosi, M.-G. Pelizzo, F. Rigato, V. Rigato, A. Giglia, S. Nannarone, "Reflectance measurements and optical constants in the extreme ultraviolet-vacuum ultraviolet regions for SiC with a different C/Si ratio", Appl. Opt. 45(22), 5642-5650, (2006).