Design and analysis of a polymeric photo-thermal microactuator

Sensors and Actuators, A: Physical

Volumn 147, Issue 1, 2008, Pages 292-299

  Elbuken, Caglar ^a   Gui, Lin ^a   Ren, Carolyn L ^a   Yavuz, Mustafa ^a   Khamesee, Mir Behrad ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

MEMS; Microactuator; Photo thermal; Polymer; SU 8

Indexed keywords

EXPERIMENTS; FINITE ELEMENT METHOD; GRIPPERS; HIGH TEMPERATURE APPLICATIONS; LASER BEAMS; LASERS; MECHANISMS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; PULSED LASER DEPOSITION; SOLDERED JOINTS; THERMAL EXPANSION; THERMAL SPRAYING;

(+ MOD 2N) OPERATION; ACTUATION MECHANISM; BENT-BEAMS; BIOMANIPULATION; BIOMEMS DEVICES; CONVENTIONAL PHOTOLITHOGRAPHY; DESIGN AND ANALYSIS; ELECTRICAL ISOLATION; ELSEVIER (CO); FINITE ELEMENT (FE) SIMULATIONS; INCIDENT LASER; LASER BEAM FOCUSING; LASER ILLUMINATIONS; LOW TEMPERATURE (LTR); MAXIMUM TEMPERATURE; MICRO ACTUATORS; MICRO GRIPPERS; NONCONTACT (NC); PRACTICAL APPLICATIONS; TIP DISPLACEMENTS;

ACTUATORS;

EID: 47649106673     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.04.019     Document Type: Article

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