An electrostatically actuated cantilever device capable of accurately calibrating the cantilever on-chip for AFM-like applications

Journal of Micromechanics and Microengineering

Volumn 19, Issue 4, 2009, Pages

  Rana, Sunil ^a,b   Ortiz, Pedro M ^a   Harris, Alun J ^a   Burdess, James S ^a   McNeil, Calum J ^a  

^a NEWCASTLE UNIVERSITY   (United Kingdom)

^b IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPES; CALIBRATION PROCEDURE; CANTILEVER DEVICES; CANTILEVER STIFFNESS; ELECTROSTATIC ACTUATION; INTERFACIAL FORCE MICROSCOPES; MICROMACHINING TECHNIQUES; NON DESTRUCTIVE; ON CHIPS; SENSING APPLICATIONS;

ELECTROSTATIC ACTUATORS; NANOCANTILEVERS;

ATOMIC FORCE MICROSCOPY;

EID: 68849090766     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/4/045012     Document Type: Article

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