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Volumn 2, Issue 7, 2009, Pages
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Preparation of NiSi2 nanowires with low resistivity by reaction between ni coating and silicon nanowires
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRICAL PROPERTY;
ENERGY DISPERSIVE X RAY SPECTROSCOPY;
GATE MATERIALS;
HIGH-RESOLUTION TRANSMISSION MICROSCOPIES;
LOW ENERGY IMPLANTATION;
LOW RESISTIVITY;
NANOELECTRONIC DEVICES;
NI COATING;
NICKEL SILICIDE;
SELECTIVE AREA ELECTRON DIFFRACTION;
SILICON NANOWIRES;
SILICON RICH;
TERMINAL ELECTRICAL MEASUREMENTS;
ELECTRIC PROPERTIES;
HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;
NANOWIRES;
NICKEL;
NICKEL ALLOYS;
SILICIDES;
ELECTRIC WIRE;
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EID: 68249121057
PISSN: 18820778
EISSN: 18820786
Source Type: Journal
DOI: 10.1143/APEX.2.075005 Document Type: Article |
Times cited : (5)
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References (18)
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