Vertical carbon nanotube devices with nanoscale lengths controlled without lithography

IEEE Transactions on Nanotechnology

Volumn 8, Issue 4, 2009, Pages 469-476

  Franklin, Aaron D ^a   Sayer, Robert A ^a   Sands, Timothy D ^b   Janes, David B ^a   Fisher, Timothy S ^a  

^a PURDUE UNIVERSITY   (United States)

^b NONE

Author keywords

Carbon nanotubes (CNTs); Length scaling; Nanotechnology; Porous anodic alumina (PAA); Vertical devices

Indexed keywords

CARBON NANOTUBE DEVICES; DRAIN CONTACTS; ETCHING PROCESS; LENGTH CONTROL; LENGTH SCALING; NANO SCALE; NANOTUBE DEVICES; POROUS ANODIC ALUMINA (PAA); POROUS ANODIC ALUMINA TEMPLATE; SI SUBSTRATES; SOURCE CONTACT; VERTICAL DEVICES;

ALUMINUM SHEET; CARBON NANOTUBES; NANOELECTRONICS; NANOSTRUCTURED MATERIALS; PALLADIUM; SINGLE-WALLED CARBON NANOTUBES (SWCN);

NANOPORES;

EID: 67949104910     PISSN: 1536125X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNANO.2009.2012399     Document Type: Article

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