In-place fabrication of nanowire electrode arrays for vertical nanoelectronics on Si substrates

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 2, 2007, Pages 343-347

  Franklin, Aaron D ^a   Maschmann, Matthew R ^a   DaSilva, Manuel ^a   Janes, David B ^a   Fisher, Timothy S ^a   Sands, Timothy D ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA PORE BARRIER OXIDES; CARBON NANOTUBE ARRAYS; HYDROGEN PLASMA;

CARBON NANOTUBES; ELECTRIC CONTACTS; ELECTROCHEMISTRY; ELECTRODES; METALLIZING; MICROELECTRONICS; NANOWIRES; OHMIC CONTACTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

PALLADIUM;

EID: 34047187540     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2647379     Document Type: Article

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