Driving frequency effect on electron heating mode transition in capacitive discharge

Applied Physics Letters

Volumn 89, Issue 17, 2006, Pages

  You, S J ^a   Ahn, S K ^a   Chang, H Y ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRIC DISCHARGES; ELECTRONS; HEATING; MAXWELL EQUATIONS; RANDOM PROCESSES;

DRIVING FREQUENCY; DRUYVESTEYN-LIKE DISTRIBUTION; GAS PRESSURE; MODE TRANSITIONS;

ELECTRON TRANSITIONS;

EID: 33750466167     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2348739     Document Type: Article

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