A linearized method to measure dynamic friction of microdevices

Experimental Mechanics

Volumn 49, Issue 3, 2009, Pages 395-401

  Corwin, A D ^a,b   de Boer, M P ^a,c  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b GE GLOBAL RESEARCH   (United States)

^c CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Dynamic friction; Friction; MEMS; Micromachine; Polysilicon; Static friction; Tribology

Indexed keywords

DYNAMIC FRICTION; LINEARIZED METHODS; MICRO DEVICES; MICROMACHINE; MICROMACHINED; NUMBER OF DATUM; SLIDING SURFACE; STATIC FRICTION;

COMPOSITE MICROMECHANICS; DYNAMIC LOADS; LINEARIZATION; MEMS; MICROELECTROMECHANICAL DEVICES; POLYSILICON; STICTION;

TRIBOLOGY;

EID: 67649386735     PISSN: 00144851     EISSN: 17412765     Source Type: Journal    
DOI: 10.1007/s11340-008-9158-9     Document Type: Article

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