Wear mechanisms in a reliability methodology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4980, Issue , 2003, Pages 22-40

  Tanner, Danelle M ^a   Dugger, Michael T ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Failures; MEMS Reliability; Reliability Methodology; Wear; Wear in humid environments; Wear Maps

Indexed keywords

ATMOSPHERIC HUMIDITY; FAILURE ANALYSIS; RELIABILITY; SENSITIVITY ANALYSIS; WEAR OF MATERIALS;

WEAR MECHANISMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0038064462     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.476345     Document Type: Conference Paper

References (28)

1. A. Hartzell and D. Wodilla, "MEMS Reliability, Characterization, and Test, Proc. Of SPIE, 4558, 2001, pp. 1-5.
2. S. Arney, "Designing for MEMS Reliability," Materials Research Society Bulletin, April, 2001, pp. 296-299.
3. S.C. Lim and M.F. Ashby, "Wear Mechanism Maps," Acta Metallurgica, 35, 1987, pp. 1-24.
4. K. Adachi, K. Kato and N. Chen, "Wear Map of Ceramics," Wear, 203-204, pp. 291-301.
5. T.E. Fischer and W.M. Mullins, "Relation Between Surface Chemistry and Tribology of Ceramics," in Friction and Wear of Ceramics, S. Jahanmir, ed., Marcel Dekker, Inc., New York, NY (1994) pp. 51-60.
6. K. J. Gabriel, F. Behi, and R. Mahadevan, "In situ Friction and Wear Measurements in Integrated Polysilicon Mechanisms," Sensors and Actuators, A21-A23, 1990, pp. 184-188.
7. M. Mehregany, K. J. Gabriel, and W. S. N. Trimmer, "Integrated fabrication of polysilicon mechanisms," IEEE Trans. Electron Devices, ED-35, 1999, pp. 719-723.
8. Lee S. Tavrow, Stephen F. Bart, and Jeffrey H. Lang, "Operational characteristics of microfabricated electric motors," Sensors and Actuators, A35, 1992, pp. 33-44.
9. S. L. Miller, J. J. Sniegowski, G. LaVigne, and P. J. McWhorter, "Performance tradeoffs for a surface micromachined microengine," Proceedings of SPIE Micromachined Devices and Components II, Vol. 2882, Austin, October. 14-15, 1996, pp. 182-191.
10. N. F. Smith, D. M. Tanner, G. F. LaVigne, S. L. Miller, W. P. Eaton, L. W. Irwin, "Super μDriver V1.0," copyright, 1998.
11. D.M. Tanner et al., "MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes," Sandia Report, SAND2000-0091, January, 2000, pp. 155-157. Download from http://www.prod.sandia.gov/cgi-bin/techlib/access-control.pl/2000/000091.pdf
12. D. M. Tanner, J. A. Walraven, Seethambal S. Mani, and Scot E. Swanson, "Pin-Joint Design Effect on the Reliability of a Polysilicon Microengine," Proceedings of IRPS, 2002, pp. 122-129.
13. W. P. Eaton, N. F. Smith, L. Irwin, D. M. Tanner, J. J. Allen, S. L. Miller, and W. M. Miller, "Characterization Techniques for Surface-Micromachined Microengines," SPIE's 1998 Symposium on Micromachining and Microfabrication, Santa Clara, CA, Vol. 3514, pp. 171-178.
14. R. L. Alley, R. T. Howe, and K. Komvopoulos, "The effect of release-etch processing on surface microstructure stiction," Proceedings of the IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, 1992, pp. 202-207.
15. E. Rabinowicz, Friction and Wear of Materials, John Wiley & Sons, Inc., 1995, pp. 143-190.
16. M. Mosleh, N. Saka, and N. P. Suh, "A mechanism of high friction in dry sliding bearings," Wear, 252, 2002, pp.1-8.
17. U. Srinivasan, J.D. Foster, U. Habib, R.T. Howe, and R. Maboudian, D.C. Senft and M.T. Dugger, "Lubrication Of Polysilicon Micromechanisms With Self-assembled Monolayers," Proc. IEEE Solid-State Sensor Actuator Workshop, Hilton Head, SC, USA, 1998, pp.156-161.
18. Danelle M. Tanner, Jeremy A. Walraven, Lloyd W. Irwin, Michael T. Dugger, Norman F. Smith, William M. Miller, and Samuel L. Miller, "The Effect of Humidity on the Reliability of a Surface Micromachined Microengine," Proc. of IEEE International Reliability Physics Symposium, 1999, pp. 189-197.
19. J. Takadoum, Z. Zsiga, M. Ben Rhouma, and C. Roques-Carmes, "Correlation between friction coefficient and wear mechanism of SiC/SiC system," Journal of Material Science Letters, 13, 1994, pp. 474-476.
20. M. G. Gee and D. Butterfield, "The combined effect of speed and humidity on the wear and friction of silicon nitride," Wear, 162-164, 1993, pp. 234-245.
21. K. Mizuhara and S. M. Hsu, "Tribochemical Reaction of Oxygen and Water on Silicon Surfaces," Wear Particles, Elsevier Science Publishers (D. Dowson et. al. Editors), 1992, pp. 323-328.
22. E. S. Zanoria, S. Danyluk, and M. J. McNallan, "Formation of Cylindrical Sliding-Wear Debris on Silicon in Humid Conditions and Elevated Temperatures," Tribology Transactions, 38, 1995, pp.721-727.
23. M. N. Gardos, "Advantages and Limitations of Silicon as a Bearing Material for MEMS Applications," Tribology Issues and Opportunities in MEMS, Kluwer Academic Publishers, Netherlands, ed. by B. Bhushan, 1998, pp. 341-365.
24. S. S. Mani, J. G. Fleming, J. A. Walraven, J. J. Sniegowski, M P. de Boer, L. W. Irwin, D. M. Tanner, D. A. LaVan, M. T. Dugger, J. Jakubczak, and W. M. Miller, "Effect of W Coating on Microengine Performance," Proceedings of IRPS, 2000, pp.146-151.
25. P.G. Kotula, M.R. Keenan and J.R. Michael, "Automated Analysis of SEM X-Ray Spectrum Images: A Powerful New Microanalysis Tool," accepted for publication in Microscopy and Microanalysis, 2003.
26. Irwin L. Singer, "How Third-Body Processes Affect Friction and Wear," MRS Bulletin, Vol. 23, No. 6, June 1998.
27. nd ed., New York, John Wiley & Sons, Inc., 1949.
28. D. M. Tanner, W. M. Miller, K. A. Peterson, M. T. Dugger, W. P. Eaton, L. W. Irwin, D. C. Senft, N. F. Smith, P. Tangyunyong, and S. L. Miller, "Frequency Dependence of the Lifetime of a Surface Micromachined Microengine Driving a Load," in Microelectronics Reliability Journal, 39 (1999) pp. 401-414.