MEMS on cavity-SOI wafers

Solid-State Electronics

Volumn 51, Issue 2, 2007, Pages 328-332

  Luoto, Hannu ^a   Henttinen, Kimmo ^a   Suni, Tommi ^a   Dekker, James ^a   Mäkinen, Jari ^b   Torkkeli, Altti ^c  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b Okmetic Oyj   (Finland)

^c VTI Technologies Oy   (Finland)

Author keywords

Cavity SOI; CSOI; Resonator; RF MEMS; SOI MEMS

Indexed keywords

CAVITY RESONATORS; DIAPHRAGMS; DRY ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

CAVITY DIMENSIONS; RF MEMS; SOI MEMS; THINNING PROCESS;

MICROELECTROMECHANICAL DEVICES;

EID: 33847248971     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2007.01.007     Document Type: Article

References (4)

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4. Frederic Marty, Bassam Saadany, Tarik Bourouina, Yoshio Mita, Tadashi Shibata, High aspect ratio nano-structures (harns) for photonic MEMS based on vertical DBR architecture, 13th International Conference on Solid State Sensors, Actuators and Microsystems (Transducers '05) Seoul, Korea, June 5-9, 2005.