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Volumn 41, Issue 3, 2005, Pages 121-122

Imaging of in- and out-of-plane vibrations in micromechanical resonator

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETERS; LASER BEAMS; MICROELECTROMECHANICAL DEVICES; MODULATION; NATURAL FREQUENCIES; PARAMETER ESTIMATION; REACTIVE ION ETCHING; RESONATORS; SCHEMATIC DIAGRAMS; SILICON ON INSULATOR TECHNOLOGY; VIBRATIONS (MECHANICAL);

EID: 14244250197     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20057018     Document Type: Article
Times cited : (17)

References (9)
  • 2
    • 0032675334 scopus 로고    scopus 로고
    • Focused ion beam tuning of in-plane vibrating micromechanical resonators
    • Syms, R.R.A., and Moore, D.F.: 'Focused ion beam tuning of in-plane vibrating micromechanical resonators', Electron. Lett., 1999, 35, (15), pp. 1277-1278
    • (1999) Electron. Lett. , vol.35 , Issue.15 , pp. 1277-1278
    • Syms, R.R.A.1    Moore, D.F.2
  • 3
    • 1942424160 scopus 로고    scopus 로고
    • Square-extensional mode single-crystal silicon micromechanical resonator for low phase noise oscillator applications
    • Kaajakari, V., Mattila, T., Oja, A., Kiihamäki, J., and Seppä, H.: 'Square-extensional mode single-crystal silicon micromechanical resonator for low phase noise oscillator applications', Electron Device Lett., 2004, 25, (4), pp. 173-175
    • (2004) Electron Device Lett. , vol.25 , Issue.4 , pp. 173-175
    • Kaajakari, V.1    Mattila, T.2    Oja, A.3    Kiihamäki, J.4    Seppä, H.5
  • 4
    • 0024303617 scopus 로고
    • Transient excitation of silicon microresonator
    • Zhang, L.M., Uttamchandani, D., and Culshaw, B.: 'Transient excitation of silicon microresonator', Electron. Lett., 1989, 25, (2), pp. 149-150
    • (1989) Electron. Lett. , vol.25 , Issue.2 , pp. 149-150
    • Zhang, L.M.1    Uttamchandani, D.2    Culshaw, B.3
  • 6
    • 0036557930 scopus 로고    scopus 로고
    • Characterization of MEMS transducer performance using near-field scanning interferometry
    • Blackshire, J.L., and Sathish, S.: 'Characterization of MEMS transducer performance using near-field scanning interferometry', IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 2002, 49, (5), pp. 669-674
    • (2002) IEEE Trans. Ultrason. Ferroelectr. Freq. Control , vol.49 , Issue.5 , pp. 669-674
    • Blackshire, J.L.1    Sathish, S.2
  • 7
    • 0035423968 scopus 로고    scopus 로고
    • 3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope
    • Petitgrand, S., Yahiaoui, R., Danaie, K., Bosseboeuf, A., and Gilles, J.P.: '3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope', Opt. Lasers Eng., 2001, 36, pp. 77-101
    • (2001) Opt. Lasers Eng. , vol.36 , pp. 77-101
    • Petitgrand, S.1    Yahiaoui, R.2    Danaie, K.3    Bosseboeuf, A.4    Gilles, J.P.5
  • 8
    • 0036772740 scopus 로고    scopus 로고
    • Measurement system for full three-dimensional motion characterization of MEMS
    • Rembe, C., and Muller, R.S.: 'Measurement system for full three-dimensional motion characterization of MEMS', J. Microelectromech. Syst., 2002, 11, (5), pp. 479-488
    • (2002) J. Microelectromech. Syst. , vol.11 , Issue.5 , pp. 479-488
    • Rembe, C.1    Muller, R.S.2
  • 9
    • 0001736550 scopus 로고    scopus 로고
    • Scanning Michelson interferometer for imaging surface acoustic wave fields
    • Knuuttila, J.V., Tikka, P.T., and Salomaa, M.M.: 'Scanning Michelson interferometer for imaging surface acoustic wave fields', Opt. Lett., 2000, 25, pp. 613-615
    • (2000) Opt. Lett. , vol.25 , pp. 613-615
    • Knuuttila, J.V.1    Tikka, P.T.2    Salomaa, M.M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.