Visualization of in- And out-of-plane vibrations in a micromechanical RF-resonator

Proceedings - IEEE Ultrasonics Symposium

Volumn 2, Issue , 2004, Pages 1359-1362

  Holmgren, Olli ^a   Kokkonen, Kimmo ^a   Mattila, Tomi ^b   Kaajakari, Ville ^b   Kiihamäki, Aarne Oja Jyrki ^b   Knuuttila, Jouni V ^a   Salomaa, Martti M ^a  

^a AALTO UNIVERSITY   (Finland)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; IMAGING TECHNIQUES; LASER BEAMS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; ULTRASONIC TRANSDUCERS;

ACOUSTIC VIBRATIONS; MICROMECHANICAL RESONATORS; SCANNING MICHELSON LASER INTERFEROMETERS; SILICON RESONATORS;

ACOUSTIC RESONATORS;

EID: 21644465892     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Kaajakari, T. Mattila, A. Oja, J. Kiihamäki, and H. Seppä, "Squareextensional mode single-crystal silicon micromechanical resonator for low phase noise oscillator applications," IEEE Electron Dev. Lett., vol. 25, no. 4, pp. 173-175, 2004.
2. A. Caronti, H. Majjad, S. Ballandras, G. Caliano, R. Carotenuto, A. Iula, V. Foglietti, and M. Pappalardo, "Vibration maps of capacitive micromachined ultrasonic transducers by laser interferometry," IEEE Trans. Ultrason.. Ferroelect., Freq. Contr., vol. 49, no. 3, pp. 289-292, 2002.
3. J. L. Blackshire and S. Sathish, "Characterization of MEMS transducer performance using near-field scanning interferometry," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 49, no. 5, pp. 669-674, 2002.
4. S. Petitgrand, R. Yahiaoui, K. Danaie, A. Bosseboeuf, and J. Gilles, "3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope," Opt. Lasers Eng., vol. 36, pp. 77-101, 2001.
5. C. Rembe and R. S. Muller, "Measurement system for full three-dimensional motion characterization of MEMS," J. Microelectromech. Syst., vol. 11, no. 5, pp. 479-488, 2002.
6. J. V. Knuuttila, P. T. Tikka, and M. M. Salomaa, "Scanning Michelson interferometer for imaging surface acoustic wave fields," Opt. Lett., vol. 25, pp. 613-615, 2000.