Chip-scale high-speed Fourier-transform spectrometer based on a combination of a Michelson and a Fabry-Perot interferometer

Proceedings of IEEE Sensors

Volumn , Issue , 2006, Pages 412-415

  Yu, Kyoungsik ^a   Park, Namkyoo ^a   Lee, Daesung ^b   Solgaard, Olav ^b  

^a Seoul National University   (South Korea)

^b Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRY-PEROT INTERFEROMETERS; FIBER OPTIC SENSORS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; INTERFEROMETRY; MICHELSON INTERFEROMETERS; MICROMACHINING; MODULATION; NONMETALS; OPTICAL INSTRUMENTS; RESONANCE; SENSORS; SILICON; SPECTROMETERS; SPECTROMETRY; SPEED;

ALL-OPTICAL; BULK MICRO-MACHINING; CHIP-SCALE; FABRY-PEROT; FOURIER; FOURIER-TRANSFORM SPECTROMETERS; HIGH RESOLUTIONS; HIGH SPEEDS; INTERFEROGRAM; MICRO MIRRORS; MICROMACHINED; OPTICAL PATH LENGTH; RESONANCE FREQUENCIES; SILICON OPTICAL BENCH;

INTERFEROMETERS;

EID: 50149110108     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.355493     Document Type: Conference Paper

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