High resolution resonant double gate transistor for oscillating structures

Sensors and Actuators, A: Physical

Volumn 90, Issue 1-2, 2001, Pages 20-30

  Weinert, Anke ^a   Andersson, Gert I ^b  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b Imego AB The Institute of Micro and Nanotechnology   (Sweden)

Author keywords

Capacitive detection; Displacement measurement; Low impedance sensing; MOSFET; Resonant gate transistor; RGT

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; ELECTRIC CONDUCTORS; MICROMACHINING; MOSFET DEVICES; SENSORS; VIBRATIONS (MECHANICAL);

RESONANT DOUBLE GATE TRANSISTORS (RDGT); VIBRATING CONDUCTORS;

GATES (TRANSISTOR);

EID: 0035341518     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00561-6     Document Type: Article

References (25)

1. Scanning tunneling microscopy - From birthday to adolescence
2. Fiber optic displacement sensor with ångström resolution
3. An electron tunneling sensor
4. Micromachined silicon tunnel sensor for motion detection
5. A monolithic displacement measurement microsystem
6. Surface micromachined tunable interferometer array
7. A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm support
8. Capacitive sensors: When and how to use them
9. Force microscope with capacitive displacement detection
10. Sensors, sensor interfacing and front-end data management for stand-alone microsystems
11. Theresonant gate transistor
12. Semiconductor pressure sensor based on FET structure
13. Linearisation of the response of a surface micromachined CMOS FET pressure sensor using membrane touchdown
14. The mechanical field effect transistor: A new force sensor
15. Micromachined accelerometer with a movable gate transistor sensing element
16. New FET accelerometer based on surface micromachining
17. Silicon membrane condenser microphone with integrated field-effect transistor
18. A review of silicon microphones
19. Low impedance sensing technique for vibrating structures
20. A CMOS-compatible device for fluid density measurements
21. A novel 3-axis monolithic silicon accelerometer
22. A bulk micromachined silicon angular rate sensor