-
2
-
-
33748886538
-
-
10.1063/1.2336996
-
J.-P. Locquet, C. Marchiori, M. Sousa, J. Fompeyrine, and J. W. Seo, J. Appl. Phys. 100, 051610 (2006). 10.1063/1.2336996
-
(2006)
J. Appl. Phys.
, vol.100
, pp. 051610
-
-
Locquet, J.-P.1
Marchiori, C.2
Sousa, M.3
Fompeyrine, J.4
Seo, J.W.5
-
6
-
-
0037434199
-
-
10.1063/1.1536247
-
X. Hu, H. Li, Y. Liang, Y. Yu, D. Marshall, J. Edwards, Jr., R. Droopad, X. Zhang, A. A. Demkov, and K. Moore, Appl. Phys. Lett. 82, 203 (2003). 10.1063/1.1536247
-
(2003)
Appl. Phys. Lett.
, vol.82
, pp. 203
-
-
Hu, X.1
Li, H.2
Liang, Y.3
Yu, Y.4
Marshall, D.5
Edwards Jr., J.6
Droopad, R.7
Zhang, X.8
Demkov, A.A.9
Moore, K.10
-
7
-
-
33846092602
-
-
10.1063/1.2407273
-
G. Delhaye, C. Merckling, M. El-Kazzi, G. Saint-Girons, M. Gendry, Y. Robach, G. Hollinger, L. Largeau, and G. Patriarche, J. Appl. Phys. 100, 124109 (2006). 10.1063/1.2407273
-
(2006)
J. Appl. Phys.
, vol.100
, pp. 124109
-
-
Delhaye, G.1
Merckling, C.2
El-Kazzi, M.3
Saint-Girons, G.4
Gendry, M.5
Robach, Y.6
Hollinger, G.7
Largeau, L.8
Patriarche, G.9
-
8
-
-
36048948025
-
-
10.1116/1.2784720
-
M. El Kazzi, G. Delhaye, C. Merckling, E. Bergignat, Y. Robach, G. Grenet, and G. Hollinger, J. Vac. Sci. Technol. A 25, 1505 (2007). 10.1116/1.2784720
-
(2007)
J. Vac. Sci. Technol. A
, vol.25
, pp. 1505
-
-
El Kazzi, M.1
Delhaye, G.2
Merckling, C.3
Bergignat, E.4
Robach, Y.5
Grenet, G.6
Hollinger, G.7
-
9
-
-
36449008603
-
-
10.1063/1.105341
-
R. A. McKee, F. J. Walker, J. R. Conner, E. D. Specht, and D. E. Zelmon, Appl. Phys. Lett. 59, 782 (1991). 10.1063/1.105341
-
(1991)
Appl. Phys. Lett.
, vol.59
, pp. 782
-
-
McKee, R.A.1
Walker, F.J.2
Conner, J.R.3
Specht, E.D.4
Zelmon, D.E.5
-
10
-
-
34247101824
-
-
10.1016/j.microrel.2007.01.036
-
C. Merckling, G. Delhaye, M. El-Kazzi, S. Gaillard, Y. Rozier, L. Rapenne, B. Chenevier, O. Marty, G. Saint-Girons, M. Gendry, Y. Robach, and G. Hollinger, Microelectron. Reliab. 47, 540 (2007). 10.1016/j.microrel.2007.01.036
-
(2007)
Microelectron. Reliab.
, vol.47
, pp. 540
-
-
Merckling, C.1
Delhaye, G.2
El-Kazzi, M.3
Gaillard, S.4
Rozier, Y.5
Rapenne, L.6
Chenevier, B.7
Marty, O.8
Saint-Girons, G.9
Gendry, M.10
Robach, Y.11
Hollinger, G.12
-
11
-
-
34248665581
-
-
10.1016/j.mee.2007.04.053
-
C. Merckling, M. El-Kazzi, L. Beccera, L. Largeau, G. Patriarche, G. Saint-Girons, and G. Hollinger, Microelectron. Eng. 84, 2243 (2007). 10.1016/j.mee.2007.04.053
-
(2007)
Microelectron. Eng.
, vol.84
, pp. 2243
-
-
Merckling, C.1
El-Kazzi, M.2
Beccera, L.3
Largeau, L.4
Patriarche, G.5
Saint-Girons, G.6
Hollinger, G.7
-
12
-
-
34247491508
-
-
10.1016/j.tsf.2006.11.157
-
C. Merckling, M. El-Kazzi, V. Favre-Nicolin, M. Gendry, Y. Robach, G. Grenet, and G. Hollinger, Thin Solid Films 515, 6479 (2007). 10.1016/j.tsf.2006.11.157
-
(2007)
Thin Solid Films
, vol.515
, pp. 6479
-
-
Merckling, C.1
El-Kazzi, M.2
Favre-Nicolin, V.3
Gendry, M.4
Robach, Y.5
Grenet, G.6
Hollinger, G.7
-
13
-
-
67449087606
-
-
edited by L. Pantisano et al., MRS Symposia Proceedings No. Materials Research Society, Warrendale, PA
-
L. Becerra, C. Merckling, N. Baboux, M. El-Kazzi, G. Saint-Girons, B. Vilquin, C. Plossu, and G. Hollinger, in Materials Science of High-k Dielectric Stacks-From Fundamentals to Technology, edited by, L. Pantisano, MRS Symposia Proceedings No. 1073E (Materials Research Society, Warrendale, PA, 2008).
-
(2008)
Materials Science of High-k Dielectric Stacks-From Fundamentals to Technology
, vol.1073
-
-
Becerra, L.1
Merckling, C.2
Baboux, N.3
El-Kazzi, M.4
Saint-Girons, G.5
Vilquin, B.6
Plossu, C.7
Hollinger, G.8
-
14
-
-
37149008667
-
-
10.1063/1.2824466
-
G. Saint-Girons, P. Regreny, L. Largeau, G. Patriarche, and G. Hollinger, Appl. Phys. Lett. 91, 241912 (2007). 10.1063/1.2824466
-
(2007)
Appl. Phys. Lett.
, vol.91
, pp. 241912
-
-
Saint-Girons, G.1
Regreny, P.2
Largeau, L.3
Patriarche, G.4
Hollinger, G.5
-
15
-
-
33645038072
-
-
10.1016/j.jcrysgro.2005.12.079
-
T. Okada, M. Ito, K. Sawada, and M. Ishida, J. Cryst. Growth 290, 91 (2006). 10.1016/j.jcrysgro.2005.12.079
-
(2006)
J. Cryst. Growth
, vol.290
, pp. 91
-
-
Okada, T.1
Ito, M.2
Sawada, K.3
Ishida, M.4
-
16
-
-
24644473769
-
-
10.1063/1.2037205
-
S. Y. Wu, M. Hong, A. R. Kortan, J. Kwo, J. P. Mannaerts, W. C. Lee, and Y. L. Huang, Appl. Phys. Lett. 87, 091908 (2005). 10.1063/1.2037205
-
(2005)
Appl. Phys. Lett.
, vol.87
, pp. 091908
-
-
Wu, S.Y.1
Hong, M.2
Kortan, A.R.3
Kwo, J.4
Mannaerts, J.P.5
Lee, W.C.6
Huang, Y.L.7
-
17
-
-
34547584774
-
-
10.1063/1.2753684
-
C. Merckling, M. El-Kazzi, G. Saint-Girons, G. Hollinger, L. Largeau, G. Patriarche, V. Favre-Nicolin, and O. Marty, J. Appl. Phys. 102, 024101 (2007). 10.1063/1.2753684
-
(2007)
J. Appl. Phys.
, vol.102
, pp. 024101
-
-
Merckling, C.1
El-Kazzi, M.2
Saint-Girons, G.3
Hollinger, G.4
Largeau, L.5
Patriarche, G.6
Favre-Nicolin, V.7
Marty, O.8
-
18
-
-
0003431953
-
-
edited by R. Z. Bachrach (Plenum, New York
-
C. S. Fadley, in Synchrotron Radiation Research, Advances in Surface, edited by, R. Z. Bachrach, (Plenum, New York, 1990).
-
(1990)
Synchrotron Radiation Research, Advances in Surface
-
-
Fadley, C.S.1
-
19
-
-
0642279866
-
-
10.1080/00018739100101502
-
S. A. Chambers, Adv. Phys. 40, 357 (1991). 10.1080/00018739100101502
-
(1991)
Adv. Phys.
, vol.40
, pp. 357
-
-
Chambers, S.A.1
-
20
-
-
0024679847
-
-
10.1002/sia.740140613
-
G. Grenet, Y. Jugnet, S. Homberg, H. C. Poon, and Tran Minh Duc, Surf. Interface Anal. 14, 367 (1989). 10.1002/sia.740140613
-
(1989)
Surf. Interface Anal.
, vol.14
, pp. 367
-
-
Grenet, G.1
Jugnet, Y.2
Homberg, S.3
Poon, H.C.4
Minh Duc, T.5
-
24
-
-
67449104088
-
-
NIST Electron Elastic-Scattering Cross-Section Database.
-
NIST Electron Elastic-Scattering Cross-Section Database.
-
-
-
-
25
-
-
0042640201
-
-
10.1103/PhysRevB.50.4424
-
S. Van, D. Steinmetz, D. Bolmont, and J. J. Koulmann, Phys. Rev. B 50, 4424 (1994). 10.1103/PhysRevB.50.4424
-
(1994)
Phys. Rev. B
, vol.50
, pp. 4424
-
-
Van, S.1
Steinmetz, D.2
Bolmont, D.3
Koulmann, J.J.4
-
26
-
-
0001277087
-
-
10.1063/1.363968
-
L. Simon, D. Aubel, L. Kubler, J. L. Bischoff, J. Gewinner, and J. L. Balladore, J. Appl. Phys. 81, 2635 (1997). 10.1063/1.363968
-
(1997)
J. Appl. Phys.
, vol.81
, pp. 2635
-
-
Simon, L.1
Aubel, D.2
Kubler, L.3
Bischoff, J.L.4
Gewinner, J.5
Balladore, J.L.6
-
27
-
-
0037095471
-
-
10.1103/PhysRevB.65.205326
-
S. Bengió, M. Martin, J. Avila, M. C. Asensio, and H. Ascolani, Phys. Rev. B 65, 205326 (2002). 10.1103/PhysRevB.65.205326
-
(2002)
Phys. Rev. B
, vol.65
, pp. 205326
-
-
Bengió, S.1
Martin, M.2
Avila, J.3
Asensio, M.C.4
Ascolani, H.5
-
28
-
-
67449085218
-
-
ICDD database, PDF No. 00-010-0425.
-
ICDD database, PDF No. 00-010-0425.
-
-
-
-
29
-
-
67449098450
-
-
ICDD database, PDF No. 00-050-0741.
-
ICDD database, PDF No. 00-050-0741.
-
-
-
|