메뉴 건너뛰기




Volumn 53, Issue 5, 2009, Pages 473-477

Effects of electrodes on the properties of sol-gel PZT based capacitors in FeRAM

Author keywords

Crystallization; Electrode; Fatigue; FeRAM; Leakage; PZT

Indexed keywords


EID: 67349286894     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2009.03.005     Document Type: Letter
Times cited : (33)

References (18)
  • 1
    • 35348846979 scopus 로고
    • Ferroelectr memories
    • Scott J.F., and Araujo C.A. Ferroelectr memories. Science 246 (1989) 1400-1405
    • (1989) Science , vol.246 , pp. 1400-1405
    • Scott, J.F.1    Araujo, C.A.2
  • 4
    • 36849002801 scopus 로고    scopus 로고
    • Effects of chemical stability of platinum/lead zirconate titanate and iridium/lead zirconate titanate interfaces on ferroelectric thin film switching reliability
    • Chen Y., and Mclntyre P.C. Effects of chemical stability of platinum/lead zirconate titanate and iridium/lead zirconate titanate interfaces on ferroelectric thin film switching reliability. Appl Phys Lett 91 (2007) 232906-232913
    • (2007) Appl Phys Lett , vol.91 , pp. 232906-232913
    • Chen, Y.1    Mclntyre, P.C.2
  • 6
    • 0007695870 scopus 로고
    • The dependence of ferroelectric and fatigue behaviors of PZT films on microstructure and orientation
    • Mansour S., and Vest R. The dependence of ferroelectric and fatigue behaviors of PZT films on microstructure and orientation. Integr Ferroelectr 1 (1992) 57-62
    • (1992) Integr Ferroelectr , vol.1 , pp. 57-62
    • Mansour, S.1    Vest, R.2
  • 7
  • 8
    • 0038757517 scopus 로고    scopus 로고
    • Leakage current mechanism in lead-based thin-film ferroelectric capacitors
    • Nagaraj B., Aggarwal A., Song T.K., Sawhney T., and Ramesh R. Leakage current mechanism in lead-based thin-film ferroelectric capacitors. Phys Rev B 59 (1999) 16022-16027
    • (1999) Phys Rev B , vol.59 , pp. 16022-16027
    • Nagaraj, B.1    Aggarwal, A.2    Song, T.K.3    Sawhney, T.4    Ramesh, R.5
  • 9
    • 0001561168 scopus 로고    scopus 로고
    • Schottky barrier heights of tantalum oxide, barium strontium titanate, lead titanate, and strontium bismuth tantalite
    • Robertson J., and Chen C.W. Schottky barrier heights of tantalum oxide, barium strontium titanate, lead titanate, and strontium bismuth tantalite. Appl Phys Lett 74 (1999) 1168-1170
    • (1999) Appl Phys Lett , vol.74 , pp. 1168-1170
    • Robertson, J.1    Chen, C.W.2
  • 11
    • 0003877758 scopus 로고    scopus 로고
    • David R. Lide, editor, version2007, 87th ed. Boca Raton FL, Taylor and Francis;
    • David R. Lide, editor. CRC handbook of chemistry and physics, internet version2007, 87th ed. Boca Raton (FL): Taylor and Francis; 2007. .
    • (2007) CRC handbook of chemistry and physics, internet
  • 13
    • 0001193874 scopus 로고
    • Electrical conductivity in lead titanate zirconate ceramics
    • Gerson R., and Hans J. Electrical conductivity in lead titanate zirconate ceramics. J Phys Chem Solids 24 (1963) 979-984
    • (1963) J Phys Chem Solids , vol.24 , pp. 979-984
    • Gerson, R.1    Hans, J.2
  • 15
    • 0001561168 scopus 로고    scopus 로고
    • Schottky barrier heights of tantalum oxide, barium strontium titanate, lead titanate, and strontium bismuth tantalate
    • Robertson J., and Chen C.W. Schottky barrier heights of tantalum oxide, barium strontium titanate, lead titanate, and strontium bismuth tantalate. Appl Phys Lett 74 (1999) 1168-1170
    • (1999) Appl Phys Lett , vol.74 , pp. 1168-1170
    • Robertson, J.1    Chen, C.W.2
  • 17
    • 0000388685 scopus 로고    scopus 로고
    • Integration and electrical properties of diffusion barrier for high density ferroelectric memory
    • Song Y.J., Kim H.H., Lee S.Y., Jung D.J., Koo B.J., Park Y.S., et al. Integration and electrical properties of diffusion barrier for high density ferroelectric memory. Appl Phys Lett 76 (2000) 451-453
    • (2000) Appl Phys Lett , vol.76 , pp. 451-453
    • Song, Y.J.1    Kim, H.H.2    Lee, S.Y.3    Jung, D.J.4    Koo, B.J.5    Park, Y.S.6
  • 18
    • 0036469463 scopus 로고    scopus 로고
    • X-ray characterization of annealed iridium films
    • Kohli S., Rithner C.D., and Dorhout P.K. X-ray characterization of annealed iridium films. J Appl Phys 91 (2002) 1149-1154
    • (2002) J Appl Phys , vol.91 , pp. 1149-1154
    • Kohli, S.1    Rithner, C.D.2    Dorhout, P.K.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.