Ferroelectric properties of Pb(Zr,Ti)O3 thin films deposited on annealed IrO2 and Ir bottom electrodes

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 5, 1999, Pages 2939-2943

  Lee, Hee Soo ^a   Um, Woo Sik ^a   Hwang, Kwang Taek ^a   Shin, Hyun Gyoo ^b   Kim, Young Bae ^b   Auh, Keun Ho ^b  

^a Korea Institute of Industrial Technology   (South Korea)

^b Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033464827     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581964     Document Type: Article

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