Characterization of a novel MEMGyroscope actuated by parametric resonance

2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007

Volumn 3 PART B, Issue , 2008, Pages 769-774

  Oropeza Ramos, Laura A ^a   Burgner, Christopher B ^a   Olroyd, Craig ^a   Turner, Kimberly L ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMMON PROBLEMS; CORIOLIS; DESIGN THEORY AND METHODOLOGY; DYNAMIC BEHAVIORS; DYNAMICAL PROPERTIES; FUNDAMENTAL FREQUENCY (FF); HARMONIC OSCILLATORS (HO); INTERNATIONAL CONFERENCES; INTERNATIONAL DESIGNS; MICRO AND NANO SYSTEMS; MICRO GYROSCOPE; PARAMETER VARIATIONS; PARAMETRIC RESONANCES; TECHNICAL CONFERENCES;

ARCHITECTURAL DESIGN; COMPUTER NETWORKS; COMPUTERS; DYNAMIC RESPONSE; DYNAMICAL SYSTEMS; DYNAMICS; ENGINEERING; GYROSCOPES; MECHANICS; MICROFLUIDICS; MICROSENSORS; NANOSYSTEMS; NATURAL FREQUENCIES; PARAMETRIC DEVICES; PARAMETRIC OSCILLATORS; RESONANCE; TECHNOLOGY;

INFORMATION SYSTEMS;

EID: 44849125346     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/DETC2007-35559     Document Type: Conference Paper

References (11)

1. Clark, W., 1997. "Micromachined vibratory rate gyroscopes". Phd thesis, University of California, Berkeley.
2. Yazdi, N., Ayazi, F., and Najafi, K., 1998. "Micromachined inertial sensors". In Proceedings of the IEEE, Vol. 86 No. 8.
3. Acar, C., and Shkel, A., 2003. "Nonresonant micromachined gyroscopes with structural mode-decoupling". IEEE Sensors Journal, 3, No.4, August.
4. Alper, S., and Akin, T., 2005. "A single-crystal silicon symmetrical and decoupled mems gyroscope on an insulating substrate". JMEMS, 14 No. 4, August.
5. Turner, K. L., Miller, S. A., Hartwell, P., MacDonald, N., Strogatz, S., and Adams, S., 1998. "Five parametric resonances in a microelectromechanical system". Nature, pp. 149-152.
6. Baskaran, R., 2003. "Parametric resonance and amplification in single and coupled micro electro mechanical systems". Phd thesis, University of California, Santa Barbara, September.
7. Zhang, W., 2004. "Nonlinear dynamics of micro-electro-mechanical oscillators and their application in mass sensing". Phd thesis, University of California, Santa Barbara, August.
8. Oropeza-Ramos, L., and Turner, K., 2005. "Parametric amplification in a memgyroscope". IEEE Sensors.
9. Adams, S., Bertsch, F., Shaw, K., and MacDonald, N., 1998. "Independent tuning of linear and nonlinear stiffness coefficients". J. Microelectromechanical Systems, 7, pp. 172-180.
10. Turner, K. L., Hartwell, P., and MacDonald, N., 1999. "Multi-dimensional mems motion characterization using laser vibrometry". Transducers, pp. 1144-1147.
11. Zhang, W., Baskaran, R., and Turner, K., 2002. "Effect of cubic nonlinearity on auto-parametrically amplified resonant mems mass sensor". Sensors and Actuators A (Physical), 102, Issues 1-2, December, pp. 139-150.