Inherently Robust micro gyroscope actuated by parametric resonance

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 872-875

  Oropeza Ramos, Laura A ^a   Burgner, Christopher B ^a   Turner, Kimberly L ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFICATION; COMPOSITE MICROMECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; PARAMETRIC DEVICES; PARAMETRIC OSCILLATORS; PHOTORESISTS; REACTIVE ION ETCHING; RESONANCE;

ACTUATION MECHANISM; DYNAMICAL CHARACTERIZATION; EXPERIMENTAL SET UPS; HARMONIC OSCILLATORS; INTERNATIONAL CONFERENCES; MICRO GYROSCOPE; MICRO-ELECTRO MECHANICAL SYSTEMS; OFF-AXIS; PARAMETRIC RESONANCES; SOI PROCESS;

GYROSCOPES;

EID: 50149100378     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443795     Document Type: Conference Paper

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