A pneumatic micropump incorporated with a normally closed valve capable of generating a high pumping rate and a high back pressure

Microfluidics and Nanofluidics

Volumn 6, Issue 6, 2009, Pages 823-833

  Yang, Yi Ning ^a   Hsiung, Suz Kai ^a   Lee, Gwo Bin ^a,b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

MEMS; Microfluidics; Micropump; Normally closed microvalve

Indexed keywords

AIR CHAMBERS; APPLIED PRESSURE; BACK PRESSURES; BACKFLOW; BENZOIC ACID; BLOCK STRUCTURES; CHEMICAL SOLUTIONS; CROSS CONTAMINATION; DRIVING FREQUENCIES; EXPERIMENTAL DATA; HIGH BACK PRESSURE; HYDRAULIC PRESSURE; MICRO-FLUIDIC DEVICES; MICROPUMP; NORMALLY CLOSED MICROVALVE; OPERATION CONDITIONS; PDMS MEMBRANE; PERISTALTIC MOTION; PH VALUE; PNEUMATIC MICROPUMP; POLYDIMETHYLSILOXANE MEMBRANE; PUMPING RATE; SODIUM HYDROXIDES; SOFT LITHOGRAPHY; V-SHAPE;

CHEMICALS; FLEXIBLE STRUCTURES; LITHOGRAPHY; MEMS; MICROCHANNELS; MICROFLUIDICS; PNEUMATICS; SILICONES; SODIUM; TITRATION; VALVES (MECHANICAL);

PUMPS;

EID: 67349245781     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-008-0356-7     Document Type: Article

References (29)

1. Ahn CH, Choi JW, Beaucage G, Nevin JH, Lee JB, Puntambekar A, Lee JY (2004) Disposable smart lab on a chip for point-of-care clinical diagnostics. Proc IEEE 92:154-173
2. Angell JB, Terry SC, Barth PW (1983) Silicon micromechanical devices. Sci Am 248:44-55
3. Auroux PA, Iossifidis D, Reyes DR, Manz A (2002) Micro total analysis systems: 2. Analytical standard operations and applications. Anal Chem 74:2637-2652
4. Baek JY, Park JY, Ju JI, Lee TS, Lee SH (2005) A pneumatically controllable flexible and polymeric microfluidic valve fabricated via in situ development. J Micromech Microeng 15:1015-1020
5. Baldi A, Gu Y, Loftness PE, Siegel RA, Ziaie B (2003) A hydrogel-actuated environmentally sensitive microvalve for active flow control. J Microelectromech Syst 12:613-621
6. Bourouina T, Bosseboeuf A, Grandchamp J (1997) Design and simulation of an electrostatic micropump for drug-delivery applications. J Micromech Microeng 7:186-188
7. Duffy DC, Schueller OJA, Brittain ST, Whitesides GM (1999) Rapid prototyping of microfluidic switches in poly(dimethyl siloxane) and their actuation by electro-osmotic flow. J Micromech Microeng 9:211-217
8. Feng GH, Kim ES (2004) Micropump based on PZT unimorph and one-way paralyne valves. J Micromech Microeng 14:429-435
9. Hosokawa K, Maeda R (2000) A pneumatically actuated three-way microvalve fabricated with polydimethylsiloxane using the membrane transfer technique. J Micromech Microeng 10:415-420
10. Hua Z, Xia Y, Srivannavit O, Rouillard JM, Zhou X, Gao X, Gulari E (2006) A versatile microreactor platform featuring a chemical-resistant microvalve array for addressable multiplex syntheses and assays. J Micromech Microeng 16:1433-1443
11. Huang CW, Huang SB, Lee GB (2006) Pneumatic micropumps with serially connected actuation chambers. J Micromech Microeng 16:2265-2272
12. Jeong OC, Konishi S (2007) Fabrication and drive test of pneumatic PDMS micro pump. Sens Actuators A 135:49-856
13. Koch M, Harris N, Evans A, White N, Brunnschweiler A (1998) A novel micromachined pump based on thick-film piezoelectric actuation. Sens Actuators A 70:98-103
14. Neagu CR, Gardeniers JGE, Elwenspoek M, Kelly JJ (1997) An electrochemical active valve. Electrochim Acta 42:3367-13
15. Ng TY, Jiang TY, Li H, Lam KY, Reddy JN (2004) A coupled field study on the non-linear dynamic characteristics of electrostatic micropump. J Sound Vib 273:989-1006
16. Nguyen NT, Truong TQ (2004) A fully polymeric micropump with piezoelectric actuator. Sens Actuators B 97:137-143
17. Paul BK, Terhaar T (2000) Comparison of two passive microvalve designs for microlamination architectures. J Micromech Microeng 10:15-20
18. Raiteri R, Grattarola M, Berger R (2002) Micromechanics senses biomolecules. Mater Today 5:22-29
19. Reyes DR, Iossifidis D, Auroux PA, Manz A (2002) Micro total analysis systems: 1. Introduction, theory, and technology. Anal Chem 74:2623-2636
20. Santra S, Hollaway P, Batich CD (2002) Fabrication and testing of a magnetically actuated micropump. Sens Actuators B 87:358-364
21. Sato K, Hibara A, Tokeshi M, Hisamoto H, Kitamori T (2003) Microchip-based chemical and biochemical analysis systems. J Chromatogr A 987:197-204
22. Sim WY, Yoon HJ, Jeong OC, Yang SS (2003) A phase-change type micropump with aluminum flap valves. J Micromech Microeng 13:286-294
23. Unger MA, Chou HP, Thorsen T, Scherer A, Quake SR (2000) Monolithic microfabricated valves and pumps by multilayer soft lithography. Science 288:113-116
24. Van de Pol FCM, Van Lintel HTG, Elwenspoek M, Fluitman JHJ (1990) Thermopneumatic micropump based on microengineering techniques. Sens Actuators A 21:198-202
25. Wang CH, Lee GB (2005) Automatic bio-sampling chips integrated with micropumps and microvalves for multiple disease detection. Biosens Bioelectron 21:419-425
26. Wang CH, Lee GB (2006) Pneumatically driven peristaltic micropumps utilizing serpentine-shape channels. J Micromech Microeng 16:341-348
27. Yamahata C, Lacharme F, Burri Y, Gijs MAM (2005) A ball valve micropump in glass fabricated by powder blasting. Sens Actuators B 110:1-7
28. Yang EH, Han SW, Yang SS (1996) Fabrication and testing of a pair of passive bivalvular microvalves composed of p + silicon diaphragms. Sens Actuators A 57:75-78
29. Zhang W, Ahn CH (1996) A bi-directional magnetic micropump on a silicon wafer. In: IEEE Solid-State Sensor and Actuator Workshop Technical Digest, pp 94-97