Fabrication and drive test of pneumatic PDMS micro pump

Sensors and Actuators, A: Physical

Volumn 135, Issue 2, 2007, Pages 849-856

  Jeong, Ok Chan ^a   Konishi, Satoshi ^b  

^a Inje University   (South Korea)

^b RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Flow rate; PDMS; Peristaltic micro pump; Pneumatic actuation

Indexed keywords

MICROACTUATORS; MICROFABRICATION; PNEUMATIC DRIVES; PUMPS; VALVES (MECHANICAL); VIDEO CAMERAS;

IRREVERSIBLE BONDING; MICRO PUMPS; PNEUMATIC ACTIONS; PNEUMATIC ACTUATORS;

MICROFLUIDICS;

EID: 34047227032     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.09.012     Document Type: Article

References (20)

1. + diaphragm. Sens. Actuators A 83 (2000) 249-255
2. Kim K.H., Yoon H.J., Jeong O.C., and Yang S.S. Fabrication and test of a microelectromagnetic actuator. Sens. Actuators A 117 (2005) 8-16
3. Sim W.Y., Yoon H.J., Jeong O.C., and Yang S.S. A phase-change type micropump with aluminum flap valves. J. Micromech. Microeng. 13 (2003) 286-294
4. Cabuz C., Cabuz E.I., Herb W.R., Rolfer T., and Zook D. Measoscopic sampler based on 3D array of electrostatically activated diagphragms. Transducers' 99. Sendai, Japan (1999) 1890-1891
5. Cabuz C., Herb W.R., Cabuz E.I., and Lu S.T. The dual diaphragm pump. 14th IEEE Microelectromechanical Systems Conference. Interlaken, Switzerland (2001) 519-522
6. Seidel H., Csepregi L., Heuberger A., and Baumgartel H. Anisotropic etching of crystalline silicon in alkaline solutions II. Influence of dopants. J. Electrochem. Soc. 137 November (11) (1990) 3626-3632
7. Chen M., Lien C., and Wan C.C. The band model and the etching mechanism of silicon in aqueous KOH. J. Electrochem. Soc. 142 January (1) (1995) 170-176
8. Cabuz C., Fukatsu K., Kurabayshi T., Minami K., and Esashi M. Microphysical investigations on mechanical structures realized in p+ silicon. J. Microelectromech. Syst. 4 3 (1995) 109-117
9. Yang E.H., Yang S.S., and Yoo S.H. A technique for quantitative determination of the profile of the residual stress along the depth of p+ silicon films. Appl. Phys. Lett. 67 7 (1995) 912-914
10. Yang E.H., and Yang S.S. The quantitative determination of the residual stress profile in oxidized p+ silicon films. Sens. Actuators A 54 (1996) 684-689
11. Jeong O.C., and Yang S.S. Correlation between the residual stress and the boron concentration in boron-doped silicon films. Jpn. J. Appl. Phys. 44 1A (2005) 350-357
12. Xie J., Shih J., and Tai Y.-C. Integrated Parylene electrostatic peristaltic pump. Proceedings of Micro TAS 2003. California, USA (October 2003) 865-868
13. H.S. Kim, K. Najafi, A. Astle, L.P. Bernal, P.D. Washabaugh, in: Proceedings of Micro TAS, Boston, USA, 2005, pp. 1173-1175.
14. Spiering V.L., Bouwstra S., Burger J.F., and Elwenspoek M. Membranes fabricated with a deep single corrugated for package stress reduction and residual stress relief. J. Micromech. Microeng. 3 (1993) 243-246
15. + diaphragm. Sens. Actuators A 80 (2000) 62-67
16. McDonald J.C., and Whitesides G.M. Poly(dimethylsiloxane) as a material for fabricating microfluidic devices. Acc. Chem. Res. 35 7 (2002) 491-499
17. Jeong O.C., and Konishi S. All PDMS pneumatic micro finger with bidirectional motion and its application. J. Microelectromech. Syst. 15 4 (2006) 896-903
18. Jeong O.C., Yamamoto T., Lee S.W., Fujii T., and Konishi S. Surface modification, mechanical property, and multi-layer bonding of PDMS and its application. Proceedings of Micro TAS 2005. Boston, USA (October 2005) 202-204
19. Unger M.A., Chou H., Thorsen T., Scherer A., and Quake S.R. Monolithic microfabricated valves and pumps by multilayer soft lithography. Science 288 (2000) 113-116
20. Jeong O.C., Park S.W., Yang S.S., and Pak J.H. Fabrication of a peristaltic PDMS micropump. Sens. Actuators A 123-124 (2005) 453-458