Rare-earth implanted Si-based light emitters and their use for smart biosensor applications

Vacuum

Volumn 83, Issue SUPPL.1, 2009, Pages

  Rebohle, L ^a   Cherkouk, C ^a   Prucnal, S ^a   Helm, M ^a   Skorupa, W ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

Electroluminescence; Rare earth ion implantation; Si based light emission

Indexed keywords

BIOSENSOR APPLICATIONS; ELECTRICAL EXCITATIONS; FLUID MEDIAS; FLUORESCENCE ANALYSIS; LIGHT EMITTERS; LOCAL OXIDATIONS; MOS STRUCTURES; PROTECTION LAYERS; RARE-EARTH; RARE-EARTH ION IMPLANTATION; RECENT PROGRESS; SI-BASED LIGHT EMISSION; UV- ANDS; VISIBLE SPECTRAL REGIONS;

BIOSENSORS; ELECTROLUMINESCENCE; FLUORESCENCE; ION BOMBARDMENT; ION IMPLANTATION; LIGHT; ORGANIC POLLUTANTS; POLLUTION DETECTION; RARE EARTH ELEMENTS; SEMICONDUCTING SILICON; SILICON; SILICON COMPOUNDS;

LIGHT EMISSION;

EID: 67349118790     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.01.015     Document Type: Article

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