Copper passivation by metal doping

Journal of Alloys and Compounds

Volumn 482, Issue 1-2, 2009, Pages 33-42

  Lanzani, G ^a   Kangas, T ^a   Laasonen, K ^a  

^a UNIVERSITY OF OULU   (Finland)

Author keywords

Atomic scale structure; Computer simulations; Corrosion; Gas solid reactions; Transition metal alloys and compounds

Indexed keywords

ATOMIC OXYGEN; ATOMIC SCALE STRUCTURE; COMPUTATIONAL DENSITY; COPPER SURFACE; CU(1 0 0); CU(1 1 0); CU(1 1 1); DENSE SURFACE; DOPANT ATOMS; DOPANT METALS; GAS-SOLID REACTIONS; METAL-DOPED; METAL-DOPING; PASSIVATING LAYER; PASSIVATION POTENTIALS; SEGREGATION ENERGIES; SUB-SURFACE; SURFACE LAYERS; SURFACE ORIENTATION; TRANSITION METAL ALLOYS AND COMPOUNDS;

ALLOYS; ALUMINUM; ATOMS; CHROMIUM; COMPUTATION THEORY; COMPUTER SIMULATION; COPPER; COPPER ALLOYS; CORROSION; DENSITY FUNCTIONAL THEORY; DOPING (ADDITIVES); METALS; OXYGEN; PASSIVATION; SEGREGATION (METALLOGRAPHY); ZINC;

SURFACE SEGREGATION;

EID: 67349109909     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2009.03.180     Document Type: Article

References (79)

1. Mazurowski K., Dowben P.A., Dowben P.A., and Miller A. Surface Segregation Phenomena (1990), CRC Press, Boca Raton, FL 365-419
2. Lanford W.A., Ding P.J., Wang W., Hymes S., and Murarka S.P. Mater. Chem. Phys. 41 (1995) 192
3. Wang P.I., Murarka S.P., Kaminski D.A., Bedell S., and Lanford W.A. J. Electron. Soc. 148 (2001) 481
4. Schlapbach L., and Züttel A. Nature 414 (2001) 353
5. Karty A., Grunzweig-Genossar J., and Rudman P. J. Appl. Phys. 50 (1979) 7200
6. A.P. Boeira, I.L. Ferreira, A. Garcia, J. Mater. Des. (2008) doi:10.1016/j.matdes.2008.08.032.
7. Hirsimäki M., Lampimäki M., Lahtonen K., Chorkendorff I., and Valden M. Surf. Sci. 583 (2005) 157
8. Sun C.Q., and Bai C.L. J. Chem. Phys. Solids 58 (1997) 903
9. Batra P., and Kleiman L. J. Electron. Spectrom. Relat. Phenom. 33 (1984) 175
10. Cook J., Azam M., Leung P., and Gruppen M. Thin Solid Fims 348 (1999) 14
11. Whelan C.M., Kinsella M., Carbonell L., Ho H.M., and Maex K. Microelectron. Eng. 70 (2003) 551
12. Strandjord J.G., Popelar S., and Jauerning C. Microelectron. Reliab. 42 (2002) 265
13. Rohan J.F., Oriordan G., and Boardman J. Appl. Surf. Sci. 185 (2002) 289
14. Aoh J.N., and Chuang C.L. J. Electron. Mater. 33 (2004) 290
15. Pala S., Mitra R., and Bhanuprasad V.V. Mater. Sci. Eng. A 480 (2008) 496
16. Wu Z.C., Liu Y.L., and Chen M.C. Thin Solid Films 358 (2000) 180
17. Horvath Z.E., Peto G., Paszti Z., Zsoldos E., Szilagyi E., Battistig G., Lohner T., Molnar G.L., and Gyulai J. Nucl. Instrum. Methods Phys. Res. B 148 (1999) 868
18. Mulas G., Schiffini L., Scudino S., and Cocco G. J. Alloys Compd. 454 (2008) 83
19. Kravchuv T., and Hoffman A. Surf. Sci. 601 (2007) 87
20. Zhao X., Liu P., Hrbek J., Rodriguez J.A., and Perez M. Surf. Sci. 592 (2005) 25
21. Creemers C., Deurinck P., Helfensteyn S., and Luyten J. Appl. Surf. Sci. 219 (2003) 11
22. Kaszkur Z. Phys. Chem. Chem. Phys. 6 (2004) 193
23. Bozzolo G., Garces J.E., Noebe R.D., Abel P., and Mosca H.O. Prog. Surf. Sci. 73 (2003) 79
24. Lloyd L.D., Johnston R.L., Salhi S., and Wilson N.T. J. Mater. Chem. 14 (2004) 1691
25. Kangas T., Nivalainen N., Pitkänen H., Puisto A., Alatalo M., and Laasonen K. Surf. Sci. 600 (2006) 4103
26. Mansfeld F., and Perez F.J. Surf. Coat. Technol. 86 (1996) 449
27. Kenneth G. Surface Engineering for Wear Resistance (1988), Prentice Hall
28. Y.W. Lee, M. Metzger, J.M. Rigsbee, USACERL Technical Report (TR) FM-93/16.
29. Shih H.H., and Tzou S.L. Surf. Coat. Technol. 124 (2000) 278
30. Iglesias-Rubianes L., Skeldon P., Thompson G.E., Habazaki H., and Shimizu K. Philos. Mag. A 81 (2001) 1579
31. Yue T.M., Wu Y.X., and Man H.C. Surf. Coat. Technol. 114 (1999) 13
32. Adams D., Alford T.L., Theodore N.D., Russell S.W., Spreitzer R.L., and Mayer J.W. Thin Solid Films 262 (1995) 199
33. Mance A., and Mihajlovic A. J. Appl. Electrochem. 10 (1980) 697
34. Grushko B., Przepirzyński B., Pavlyuchkov D., Mi S., Kowalska-Strze{ogonek}ciwilk E., and Surowiec M. J. Alloys Compd. 442 (2007) 214
35. Perdew J.P., Chevary J.A., Vosko S.H., Jackson K.A., Pederson M.R., Singh D.J., and Fiolhais C. Phys. Rev. B 46 (1992) 6671
36. Perdew J.P., Chevary J.A., Vosko S.H., Jackson K.A., Pederson M.R., Singh D.J., and Fiolhais C. Phys. Rev. B 48 (1993) 4978
37. Kresse G., and Hafner J. J. Phys. Condens. Matter 6 (1994) 8245
38. Blochl P.E. Phys. Rev. B 50 N24 (1994) 17953
39. Kresse G., and Joubert J. Phys. Rev. B 59 (1999) 1758
40. Methfessel M., and Paxton A.T. Phys. Rev. B 40 (1989) 3616
41. Ashcroft N.W., and Mermin D. Solid State Physics (1976), Thomson Publishing
42. Kangas T., Laasonen K., Puisto A., Pitkänen H., and Alatalo M. Surf. Sci. 584 (2005) 62
43. Lanzani G., and Laasonen K. Surf. Sci. 602 (2008) 321
44. Reuter K., Ganduglia-Pirovano M.V., Stampfl C., and Scheffler M. Phys. Rev. B 65 (2002) 165403
45. Harrison M.J., Woodruff D.P., and Robinson J. Surf. Sci. 600 (2006) 340
46. Kuittinen R.L., and Laasonen K. Chem. Phys. 314 (2005) 19
47. Makov G., and Payne M.C. Phys. Rev. B 51 (1995) 4014
48. Adams D.L., Nielsen H.B., and Andersen J.N. Surf. Sci. 128 (1983) 294
49. Davis H.L., and Noonan J.R. Surf. Sci. 126 (1983) 245
50. Zheng J.C., Wang H.Q., Wee A.T.S., and Huan C.H.A. Surf. Rev. Lett. 8 (2001) 541
51. Lind D.M., Dunning F.B., Walter G.K., and Davis H.L. Phys. Rev. B 35 (1987) 9037
52. Mayer R., Zhang C., Lynn K.G., Frieze W.E., Jona F., and Marcus P.M. Phys. Rev. B 35 (1987) 3102
53. Tear S.P., Roll K., and Prutton M. J. Phys. C 14 (1981) 3297
54. Bohnen K.P., and Ho K.M. Surf. Sci. Rep. 19 (1993) 99
55. Bartos I., Barbievi A., Hove M.A.V., Chung W.F., Cai Q., and Altman M.S. Phys. Rev. B 2 (1995) 477
56. Lindgren S.A., Wallden L., Rundgren J., and Westrin P. Phys. Rev. B 29 (1984) 576
57. Wan J., Fan Y.L., Gong D.W., Shen S.G., and Fan X.Q. Model. Simul. Mater. Sci. Eng. 7 (1999) 168
58. Hakkinen H., and Manninen M. Phys. Rev. B 46 (1992) 1725
59. Khein A., Singh D.J., and Umrigar C.J. Phys. Rev. B 51 (1995) 4150
60. Xiaoqing H.E., Baiqing X., Zeming S., Yongan Z., Feng W., and Baohong Z. Rare Met. 27 (2008) 210
61. Hu X., Margolia H., Duan X., and Nourbakhsh S. Mater. Sci. Eng. A 157 (1992) 169
62. Alemozafar A.R., Guo X., and Madix R.J. Surf. Sci. 524 (2003) 84
63. Alemozafar A.R., Guo X., and Madix R.J. J. Chem. Phys. 116 11 (2002) 4698
64. Alemozafar A.R., Guo X., and Madix R.J. Surf. Sci. 526 (2003) 127
65. Theiss S.D., Kahn A., and Wagner S. IEEE Electron. Device Lett. 18 (1997) 338
66. Bolduc M., Popovici D., and Terreault B. Surf. Coat. Technol. 138 (2001) 125
67. Hoffman A., Maniv T., and Folman M. Surf. Sci. (1988) 19357
68. Zhu L., Zur Muhlen E., O'Connor D.J., and King B.V. Surf. Rev. Lett. 3 (1996) 1241
69. In: Brandes E.A. (Ed). Smithells Metal Reference Book. 6th ed. (1983), Butterworths, London
70. Handbook of Chemistry and Physics, 81st ed., 2000.
71. McLean D. Grain Boundaries in Metals (1957), Oxford University Press, London
72. Napetschnig E., Schmid M., and Varga P. Surf. Sci. 602 (2008) 1750
73. Baird R.J., and Eberhardt W. J. Vac. Technol. 18 (1981) 340
74. Baird R.J., and Potter T.J. J. Vac. Sci. Technol. A 3 (1985) 1371
75. Zhu L., King B.V., O'Connor D.J., Zur Muihen E., King B.V., and MacDonald R.J. Surf. Sci. 359 (1996) 54
76. Zhu L., King B.V., O'Connor D.J., and Zur Muhlen E. Appl. Phys. 29 (1996) 2564
77. Shen W., Nyberg G.L., and Hoffman A. Surf. Sci. 334 (1995) 209
78. Hoffman A., and Folman M. Vacuum 42 (1991) 1133
79. Pashusky A. Vacuum 44 (1993) 997