Passivation of copper films with magnesium doping using recoil ion implantation

Thin Solid Films

Volumn 358, Issue 1, 2000, Pages 180-186

  Wu, Zhen Cheng ^a   Liu, Yu Lin ^a   Chen, Mao Chieh ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; COPPER; DOPING (ADDITIVES); ION IMPLANTATION; MAGNESIUM; MULTILAYERS; OXIDATION RESISTANCE; PASSIVATION; SILICA; SILICON;

RECOIL ION IMPLANTATION;

METALLIC FILMS;

EID: 0033889929     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00660-4     Document Type: Article

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