Frequency drift compensation in mass-sensitive chemical sensors based on periodic stiffness modulation

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 284-287

  Demirci, K S ^a   Seo, J H ^a,c   Truax, S ^a   Beardslee, L A ^a   Luzinova, Y ^a   Mizaikoff, B ^b   Brand, O ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c QUALCOMM INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MEASUREMENTS; CHEMICAL MICROSENSORS; CHEMICAL SENSING SYSTEMS; CLOSED-LOOP; COMPENSATION METHOD; COMPENSATION SCHEME; DRIFT COMPENSATION; ENVIRONMENTAL DISTURBANCES; FEED-BACK LOOP; FREQUENCY DRIFTS; FREQUENCY MEASUREMENTS; FREQUENCY SHIFT; GASPHASE; MEASURAND; MICRO RESONATORS; Q-FACTOR; QUALITY FACTORS; SIMULTANEOUS MEASUREMENT; STIFFNESS MODULATION;

CHEMICAL SENSORS; FREQUENCY SHIFT KEYING; MODULATION; STIFFNESS;

Q FACTOR MEASUREMENT;

EID: 65949099969     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805374     Document Type: Conference Paper

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