Gas and liquid phase sensing of volatile organics with disk microresonator

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 220-223

  Truax, S ^a   Demirci, K S ^a   Seo, J H ^a   Kurzawski, P ^c   Luzinova, Y ^b   Hierlemann, A ^c   Mizaikoff, B ^b   Brand, O ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ARSENIC COMPOUNDS; CHLORINE COMPOUNDS; COMPOSITE MICROMECHANICS; DISKS (STRUCTURAL COMPONENTS); LIQUID PHASE EPITAXY; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; ORGANIC COMPOUNDS; PLASTIC COATINGS; REACTIVE ION ETCHING; STABILITY; VOLATILE ORGANIC COMPOUNDS;

FEED BACK LOOPS; FUNCTIONALIZED; IN-PLANE; INTERNATIONAL CONFERENCES; LIQUID PHASES; LIQUID-PHASE; MEMS RESONATORS; MICRO RESONATORS; MICRO-ELECTRO MECHANICAL SYSTEMS; SHORT-TERM FREQUENCY STABILITY; VIBRATIONAL MODE; VOLATILE ORGANICS;

MICROELECTROMECHANICAL DEVICES;

EID: 50149109444     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443632     Document Type: Conference Paper

References (8)

1. R. Lucklum and P. Hauptmann. "Acoustic microsensors - the challenge behind microgravimetry," Analytical and Bioanalytical Chemistry, vol. 684, pp. 667-682, 2006.
2. D. Lange, C. Hagleitner, A. Hierlemann, O. Brand and H. Baltes, "Complementary metal oxide semiconductor cantilever arrays on a single chip: mass-sensitive detection of volatile organic compounds," Analytical Chemistry, vol. 74, pp. 3084-3095, 2002.
3. C. Vancura, Y. Li, J. Lichtenberg, K.U. Kirstein, and A. Hierlemann. "Liquid-phase chemical and biochemical detection using fully integrated magnetically actuated complementary metal oxide semiconductor resonant cantilever systems," Analytical Chemistry, vol. 79, pp. 1646-1654, 2007.
4. S.J. Martin, A.J. Ricco, T.M. Niemczyk and G.C. Frye. "Characterization of SH acoustic plate mode liquid sensors," Sensors and Actuators, vol. 20, pp. 253-268, 1989.
5. J.H. Seo and O. Brand. "Novel high Q-factor resonant microsensor platform for chemical and biological applications," in Proc. Transducers 05, 2005, pp. 593-596.
6. J.H. Seo, L. Bentacor, K.S. Demirci, A. Byun, J. Spain and O. Brand. "Liquid-phase biochemical sensing with disk-type resonant microsensor," in Proc. Transducers 07, 2007, pp. 1737-1740.
7. J.W. Grate, S.N. Kaganove, and V.R. Bhethanabotla. "Comparisons of polymer/gas partition coefficients calculated from responses of thickness shear mode and surface acoustic wave vapor sensors," Analytical Chemistry, vol. 70, pp. 199-203, 1998.
8. J.H. Seo, K.S. Demirci, A. Byun, S. Truax and O. Brand. "Novel temperature compensation scheme for microresonators based on controlled stiffness modulation," in Proc. Transducers 07, 2007, pp. 2457-2460.