MEMS electrostatic actuation in conducting biological media

Journal of Microelectromechanical Systems

Volumn 18, Issue 2, 2009, Pages 405-413

  Mukundan, Vikram ^a   Pruitt, Beth L ^a  

^a Stanford University   (United States)

Author keywords

Cell mechanics; Electric double layer; Electrostatic actuator; Ionic media; Planar force sensing

Indexed keywords

BIOLOGICAL CELLS; BIOLOGICAL MEDIAS; CELL MECHANICS; CIRCUIT MODELS; COMB-DRIVE ACTUATORS; DIFFERENTIAL DRIVES; ELECTRIC DOUBLE LAYER; ELECTROSTATIC ACTUATIONS; FREQUENCY DEPENDENCES; FREQUENCY RANGES; HIGH CONDUCTIVITIES; HIGH FREQUENCIES; IONIC MEDIA; PARASITIC IMPEDANCES; PLANAR FORCE SENSING; SUSPENDED STRUCTURES;

ACTUATORS; CELL CULTURE; CELL MEMBRANES; ELECTROCHEMISTRY; ELECTROSTATIC FORCE; IONIC STRENGTH; MECHANICS; SENSORS;

ELECTROSTATIC ACTUATORS;

EID: 65449186716     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2013398     Document Type: Article

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