Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids

Applied Physics Letters

Volumn 88, Issue 3, 2006, Pages 1-3

  Legrand, B ^a   Rollier, A S ^a   Collard, D ^a,b   Buchaillot, Lionel ^a  

^a INSTITUT D ELECTRONIQUE   (France)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AIR; DIELECTRIC LIQUIDS; ELECTRIC POTENTIAL; INSULATING MATERIALS;

ELECTRICAL INSULATING LAYERS; ELECTROSTATIC FORCES; PARALLEL-PLATE ELECTROSTATIC ACTUATORS;

ELECTROSTATIC ACTUATORS;

EID: 31144451367     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2165282     Document Type: Article

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