Electrostatically actuated resonance of amorphous silicon microresonators in water

Applied Physics Letters

Volumn 89, Issue 14, 2006, Pages

  Adrega, T ^a   Chu, V ^a   Conde, J P ^a,b  

^a INESC   (Portugal)

^b Department of Chemical and Biological Engineering ^*  (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION CONDITIONS; ELECTROSTATICALLY ACTUATED RESONANCE; MICROBRIDGES; NONPASSIVATED STRUCTURES;

ELECTROLYSIS; ELECTROSTATIC ACTUATORS; NATURAL FREQUENCIES; RESONANCE; RESONATORS; WATER;

AMORPHOUS SILICON;

EID: 33749476303     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2358215     Document Type: Article

References (17)

1. B. Ilic, D. Caplewski, H. G. Craighead, P. Neuzil, C. Campagnolo, and C. Batt, Appl. Phys. Lett. 77, 450 (2000).
2. S. Cherian, R. K. Gupta, B. Mullin, and T. Thundat, Biosens. Bioelectron. 19, 411 (2003).
3. M. Su, S. Li, and V. P. Dravid, Appl. Phys. Lett. 82, 3562 (2003).
4. A. Gupta, D. Akin, and R. Bashir, Appl. Phys. Lett. 84, 1976 (2004).
5. J. W. Yi, W. Y. Shih, R. Mutharasan, and W. Shih, J. Appl. Phys. 93, 619 (2003).
6. P. I. Oden, G. Y. Chen, R. A. Steele, R. J. Warmack, and T. Thundat, Appl. Phys. Lett. 68, 3814 (1996).
7. N. Maluf, An Introduction to Microelectromechanical Systems Engineering (Artech House, Boston, 2000), p. 91.
8. T. L. Sounart, T. A. Michalske, and K. R. Zavadil, J. Microelectromech. Syst. 14, 125 (2005).
9. B. Legrand, A. S. Rollier, D. Collard, and L. Buchaillot, Appl. Phys. Lett. 88, 034105 (2006).
10. M. Boucinha, V. Chu, and J. P. Conde, Appl. Phys. Lett. 73, 502 (1998).
11. J. Gaspar, V. Chu, and J. P. Conde, Appl. Phys. Lett. 84, 622 (2004).
12. J. Gaspar, V. Chu, and J. P. Conde, J. Appl. Phys. 93, 10018 (2003).
13. W. Weaver, Jr., S. P. Timoshenko, and D. H. Young, Vibration Problems in Engineering (Wiley, New York, 1990), p. 39.
14. J. H. Lee, T. S. Kim, and K. H. Yoon, Appl. Phys. Lett. 86, 3187 (2004).
15. J. E. Sader, J. Appl. Phys. 84, 64 (1998).
16. A. Maali, C. Hurth, R. Boisgard, C. Jai, T. Cohen-Bouhacina, and J. P. Aiḿ, J. Appl. Phys. 97, 074907 (2005).
17. H. Hosaka, K. Itao, and S. Kuroda, Sens. Actuators, A 49, 87 (1995).