Ablation dynamics of tin micro-droplet irradiated by double pulse laser used for extreme ultraviolet lithography source

Journal of Physics D: Applied Physics

Volumn 41, Issue 24, 2008, Pages

  Nakamura, D ^a   Akiyama, T ^a   Okazaki, K ^b   Tamaru, K ^a   Takahashi, A ^b   Okada, T ^a  

^a KYUSHU UNIVERSITY   (Japan)

^b KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION DYNAMICS; DENSE PARTICLES; DOUBLE PULSE LASERS; FARADAY CUPS; HIGH-SPEED IMAGING; KINETIC BEHAVIOURS; LASER-INDUCED FLUORESCENCE IMAGING; MAIN PULSE; ND : YAG LASERS; PLASMA EXPANSIONS; PRE PULSE; PULSE IRRADIATIONS; Q-SWITCHED ND:YAG LASERS; REACTION FORCES;

ABLATION; ATOMS; DEBRIS; DROP FORMATION; DYNAMICS; EXTREME ULTRAVIOLET LITHOGRAPHY; IRRADIATION; LASER BEAM EFFECTS; LASER PULSES; LASERS; NEODYMIUM; PULSED LASER APPLICATIONS; SODIUM COMPOUNDS; TARGETS; TIN; TITANIUM COMPOUNDS; ULTRAVIOLET DEVICES;

NEODYMIUM LASERS;

EID: 65449126738     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/24/245210     Document Type: Article

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