Assessment of swift-ion damage by RBS/C: Determination of the amorphization threshold

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 267, Issue 8-9, 2009, Pages 1460-1463

  Rivera, A ^a   Olivares, J ^b,c   Crespillo, M L ^c   Garcia G ^d   Bianconi, M ^e   Agullo Lopez F ^c,f  

^a INSTITUTO DE MICROELECTRÓNICA DE MADRID   (Spain)

^b INSTITUTO DE ÓPTICA   (Spain)

^c CENTRO DE MICROANÁLISIS DE MATERIALES   (Spain)

^d ALBA SYNCHROTRON LIGHT SOURCE   (Spain)

^e CNR   (Italy)

^f UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

Author keywords

Amorphization threshold; Channeling; Damage; Excitons; Ion beams; RBS C; Thermal spike

Indexed keywords

AMORPHIZATION; DEFECTS; EXCITONS; ION BEAMS; ION BOMBARDMENT; IONS; LITHIUM COMPOUNDS; NIOBIUM COMPOUNDS; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

CHANNELING; CHANNELING CONDITIONS; DAMAGE; EXCITON DECAY; LINBO3 CRYSTALS; RUTHERFORD BACK-SCATTERING SPECTROMETRY; STOPPING POWER; THERMAL SPIKES;

DAMAGE DETECTION;

EID: 65249160681     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2009.01.134     Document Type: Article

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