Performance evaluation of precision nanopositioning devices caused by uncertainties due to tolerances using function approximation moment method

Review of Scientific Instruments

Volumn 77, Issue 1, 2006, Pages 1-9

  Huh, J S ^a   Kim, K H ^a   Kang, D W ^a   Gweon, D G ^a   Kwak, B M ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; FINITE ELEMENT METHOD; FUNCTIONS; PROBABILITY; RESONANCE; STATISTICAL METHODS;

APPROXIMATION MOMENT; PRECISION NANOPOSITIONING; STATISTICAL MOMENTS;

NANOTECHNOLOGY;

EID: 31544454739     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2162750     Document Type: Article

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