Precision nano-alignment system using machine vision with motion controlled by piezoelectric motor

Mechatronics

Volumn 18, Issue 1, 2008, Pages 21-34

  Kuo, W M ^a   Chuang, S F ^a   Nian, C Y ^a   Tarng, Y S ^a  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Auto alignment; Characteristic matrix; Fiducial mark shape; Nanometer; Piezoelectric motor

Indexed keywords

ALGORITHMS; CHARGE COUPLED DEVICES; COMPUTER VISION; FEEDBACK;

CHARACTERISTIC MATRIX; FIDUCIAL MARK; FIDUCIAL MARK SHAPES; NANO ALIGNMENT SYSTEM; NANOMETER; PIEZOELECTRIC MOTORS;

PIEZOELECTRIC DEVICES;

EID: 37349058126     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechatronics.2007.07.010     Document Type: Article

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