Development of compact high precision linear piezoelectric stepping positioner with nanometer accuracy and large travel range

Review of Scientific Instruments

Volumn 78, Issue 7, 2007, Pages

  Kang, Dongwoo ^a   Lee, Moon G ^b   Gweon, Daegab ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Ajou University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MOTION CONTROL; OPTICAL DEVICES; POSITION CONTROL; PRECISION ENGINEERING; SPECIFICATIONS;

MICROBIOLOGICAL CELL MANIPULATION; PIEZOELECTRIC STEPPING POSITIONER; PRECISION ALIGNMENT;

PIEZOELECTRIC DEVICES;

ACOUSTICS; ARTICLE; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; LABORATORY DIAGNOSIS; METHODOLOGY; MICROMANIPULATION; MOTION; NANOTECHNOLOGY; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY;

ACOUSTICS; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MICROMANIPULATION; MINIATURIZATION; MOTION; NANOTECHNOLOGY; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; SPECIMEN HANDLING;

EID: 34547600864     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2756627     Document Type: Article

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