3D calibration of a scanning force microscope with internal laser interferometers

Surface and Interface Analysis

Volumn 25, Issue 7-8, 1997, Pages 606-610

  Bienias, M ^a   Gao, S ^b   Hasche, K ^a   Seemann, R ^a   Thiele, K ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b National Institute for Food and Drug Control   (China)

Author keywords

Abbe error; Compensation by software; Cross talk; Laser interferometric calibration; Non linearity of scales; Scanning force microscope; Spatial dependence

Indexed keywords

CALIBRATION; COMPUTER SOFTWARE; ERROR COMPENSATION; HARDNESS; INTERFEROMETERS; MEASUREMENT ERRORS; MECHANICAL VARIABLES MEASUREMENT; MICROSTRUCTURE; REGRESSION ANALYSIS; THICKNESS MEASUREMENT;

ABBE ERRORS; LASER INTERFEROMETRIC CALIBRATION; SCANNING FORCE MICROSCOPY (SFM);

MICROSCOPES;

EID: 0031152426     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(sici)1096-9918(199706)25:7/8<606::aid-sia285>3.0.co;2-s     Document Type: Article

References (6)

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3. K. Bartzke et al. Zeiss Information mit Jenaer Rundschau, vol. 4, ISSN 0941-7559, pp. 10-12 (1994).
4. The Digital Piezo Translator. Queensgate Instruments, UK (1994).
5. X. Zhao, High Resolution Three-Dimensional Determination of Position in Scanning Probe Microscopes by Capacitance Sensors, PTB-Report PTB-F-20. PTB, Braunschweig (1995).
6. ELKOMAT 2000. Moeller-Wedel, Germany.