Coupling of cantilever lateral bending and torsion in torsional resonance and lateral excitation modes of atomic force microscopy

Journal of Applied Physics

Volumn 99, Issue 9, 2006, Pages

  Song, Yaxin ^a   Bhushan, Bharat ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ATOMIC FORCE MICROSCOPY; BENDING STRENGTH; ELECTRIC EXCITATION; IMAGE PROCESSING; MEASUREMENT THEORY; PARAMETER ESTIMATION; PROBLEM SOLVING; RESONANCE; SURFACE PROPERTIES; VISCOELASTICITY;

CANTILEVER DYNAMIC CHARACTERISTICS; CANTILEVER LATERAL BENDING; PURE TORSIONAL VIBRATIONS; TORSIONAL RESONANCES (TR);

TORSIONAL STRESS;

EID: 33646870170     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2195021     Document Type: Article

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