메뉴 건너뛰기




Volumn 25, Issue 2, 2009, Pages 211-218

Nonlinear static and dynamic responses of an electrically actuated viscoelastic microbeam

Author keywords

MEMS; Nonlinear dynamics; Viscoelastic microbeam

Indexed keywords

ALTERNATING CURRENTS; DIRECT-CURRENTS; ELECTRIC FORCES; EULER-BERNOULLI; GOVERNING EQUATIONS; LARGEST LYAPUNOV EXPONENTS; NON-LINEAR STATICS; NONLINEAR DYNAMICS; PHYSICAL MEANINGS; PULL-IN; PULL-IN INSTABILITIES; PULL-IN VOLTAGES; RELAXATION COEFFICIENTS; TAYLOR SERIES EXPANSIONS; VISCOELASTIC MICROBEAM;

EID: 64249093155     PISSN: 05677718     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10409-008-0216-4     Document Type: Article
Times cited : (38)

References (19)
  • 1
    • 0036600512 scopus 로고    scopus 로고
    • A dynamic model, including contact bounce, of an electrostatically actuated microswitch
    • B. McCarthy G.G. Adams N.E. McGruer 2002 A dynamic model, including contact bounce, of an electrostatically actuated microswitch J. Microelectromech. Syst. 11 3 276 283
    • (2002) J. Microelectromech. Syst. , vol.11 , Issue.3 , pp. 276-283
    • McCarthy, B.1    Adams, G.G.2    McGruer, N.E.3
  • 2
    • 17044404286 scopus 로고    scopus 로고
    • Nonlinear dynamical system of micro-cantilever under combined parametric and forcing excitation in MEMS
    • W.M. Zhang G. Meng 2005 Nonlinear dynamical system of micro-cantilever under combined parametric and forcing excitation in MEMS Sens. Actuators A 119 291 299
    • (2005) Sens. Actuators A , vol.119 , pp. 291-299
    • Zhang, W.M.1    Meng, G.2
  • 3
    • 33244472612 scopus 로고    scopus 로고
    • Complex oscillations and chaos in electrostatic microelectromechanical systems under superharmonic excitations
    • S.K. De N.R. Aluru 2005 Complex oscillations and chaos in electrostatic microelectromechanical systems under superharmonic excitations Phys. Rev. Lett. 94 204101 1 4
    • (2005) Phys. Rev. Lett. , vol.94 , Issue.101-204 , pp. 1-4
    • De S., K.1    Aluru, N.R.2
  • 4
    • 34249742014 scopus 로고    scopus 로고
    • Electromechanical coupled nonlinear dynamics for microbeams
    • L. Xu X. Jia 2007 Electromechanical coupled nonlinear dynamics for microbeams Arch. Appl. Mech. 77 485 502
    • (2007) Arch. Appl. Mech. , vol.77 , pp. 485-502
    • Xu, L.1    Jia, X.2
  • 5
    • 34249900757 scopus 로고    scopus 로고
    • Stability, nonlinear and reliability of electrostatically actuated MEMS devices
    • W.M. Zhang G. Meng D. Chen 2007 Stability, nonlinear and reliability of electrostatically actuated MEMS devices Sensors 7 760 796
    • (2007) Sensors , vol.7 , pp. 760-796
    • Zhang, W.M.1    Meng, G.2    Chen, D.3
  • 6
    • 0031168990 scopus 로고    scopus 로고
    • M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures
    • P.M. Osterberg S.D. Senturia 1997 M-TEST: a test chip for MEMS material property measurement using electrostatically actuated test structures J. Microelectromech. Syst. 6 2 107 118
    • (1997) J. Microelectromech. Syst. , vol.6 , Issue.2 , pp. 107-118
    • Osterberg, P.M.1    Senturia, S.D.2
  • 7
    • 0037284599 scopus 로고    scopus 로고
    • A study of nonlinear response of a resonant microbeam to an electric actuation
    • M.I. Younis A.H. Nayfeh 2003 A study of nonlinear response of a resonant microbeam to an electric actuation Nonlinear Dyn. 31 91 117
    • (2003) Nonlinear Dyn. , vol.31 , pp. 91-117
    • Younis, M.I.1    Nayfeh, A.H.2
  • 8
    • 0242580109 scopus 로고    scopus 로고
    • Electromechanical model of RF MEMS switches
    • L.X. Zhang Y.P. Zhao 2003 Electromechanical model of RF MEMS switches Microsyst. Technol. 9 420 426
    • (2003) Microsyst. Technol. , vol.9 , pp. 420-426
    • Zhang, L.X.1    Zhao, Y.P.2
  • 9
    • 4444272849 scopus 로고    scopus 로고
    • Pull-in dynamics of an elastic beam actuated by continuously distributed electrostatic force
    • S. Krylov R. Maimon 2004 Pull-in dynamics of an elastic beam actuated by continuously distributed electrostatic force J. Vib. Acoust. 126 332 342
    • (2004) J. Vib. Acoust. , vol.126 , pp. 332-342
    • Krylov, S.1    Maimon, R.2
  • 10
    • 33744536975 scopus 로고    scopus 로고
    • The influence of stress gradient on the pull-in phenomena of microelectromechanical switches
    • H. Sadeghian G. Rezazadeh 2006 The influence of stress gradient on the pull-in phenomena of microelectromechanical switches J. Phys. Conf. Ser. 34 1117 1122
    • (2006) J. Phys. Conf. Ser. , vol.34 , pp. 1117-1122
    • Sadeghian, H.1    Rezazadeh, G.2
  • 12
    • 35748959914 scopus 로고    scopus 로고
    • Vibrations of narrow microbeams predeformed by an electric field
    • R.C. Batra M. Porfiri D. Spinello 2008 Vibrations of narrow microbeams predeformed by an electric field J. Sound Vib. 309 600 612
    • (2008) J. Sound Vib. , vol.309 , pp. 600-612
    • Batra, R.C.1    Porfiri, M.2    Spinello, D.3
  • 13
    • 0025419444 scopus 로고
    • Creep of sensor's elastic elements: Metals versus non-metals
    • K. Bethe D. Baumgarten J. Frank 1990 Creep of sensor's elastic elements: metals versus non-metals Sens. Actuators A 21 844 849
    • (1990) Sens. Actuators A , vol.21 , pp. 844-849
    • Bethe, K.1    Baumgarten, D.2    Frank, J.3
  • 15
    • 33646742229 scopus 로고    scopus 로고
    • Characteristics of creep buckling for viscoelastic laminated plates
    • (in Chinese)
    • F. Peng Y.M. Fu 2003 Characteristics of creep buckling for viscoelastic laminated plates Acta Mech. Sin. 35 3 353 356 (in Chinese)
    • (2003) Acta Mech. Sin. , vol.35 , Issue.3 , pp. 353-356
    • Peng, F.1    Fu, Y.M.2
  • 17
    • 0035966315 scopus 로고    scopus 로고
    • The Lyapunov exponents as a quantitative criterion for the dynamic buckling of composite plates
    • R. Gilat J. Aboudi 2002 The Lyapunov exponents as a quantitative criterion for the dynamic buckling of composite plates Int. J. Solids Struct. 39 467 481
    • (2002) Int. J. Solids Struct. , vol.39 , pp. 467-481
    • Gilat, R.1    Aboudi, J.2
  • 18
    • 34249878462 scopus 로고    scopus 로고
    • Lyapunov exponents as a criterion for the dynamic pull-in instability of electrostatically actuated microstructures
    • S. Krylov 2007 Lyapunov exponents as a criterion for the dynamic pull-in instability of electrostatically actuated microstructures Int. J. Nonlinear Mech. 42 626 642
    • (2007) Int. J. Nonlinear Mech. , vol.42 , pp. 626-642
    • Krylov, S.1
  • 19
    • 0007091042 scopus 로고
    • Stability and Lyapunov stability of dynamical systems: A differential approach and a numerical method
    • I. Goldhirsch P.L. Sulem S.A. Orszag 1987 Stability and Lyapunov stability of dynamical systems: a differential approach and a numerical method Physica D 27 311 337
    • (1987) Physica D , vol.27 , pp. 311-337
    • Goldhirsch, I.1    Sulem, P.L.2    Orszag, S.A.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.