The influence of stress gradient on the pull-in phenomena of microelectromechanical switches

Journal of Physics: Conference Series

Volumn 34, Issue 1, 2006, Pages 1117-1122

  Sadeghian, H ^a   Rezazadeh, Gh ^a  

^a URMIA UNIVERSITY   (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33744536975     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/34/1/184     Document Type: Article

References (8)

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3. J De Coster, H A C Tilmans, J M J den Toonder, J T M van Beek, Th G S M Rijks, P G Steenken, R Puers 2005 Impirical and theoretical characterisation of electrostatically driven mems structures with Stress gradient J. Sensors Actuators A DTD 5
4. Hornbeck L J 1991 Spatial light modulator and method Us patent 5,061,049
5. O Bochobza-Degani Investigation of motion sensing and actuation mechanism in microelectro-opto-mechanical systems (MEOMS) and their applications PhD Dissertation, Supervised by Y Nemirovsky (Technion-Israel Institute of thechnology)
6. Zhang L X and Zhao Y-P 2003 Electromechanical Model of RF MEMS Switches Microsystem Technologies 9 420-426
7. Mukherjee T, G K Fedder and R D Blanton Oct-Dec 1999 Hierarchical design and test of integrated microsystems IEEE Design Test 16 18-27
8. Hu Y C, C M Chang, S C Huang 2004 Some design consideration on the electrostatically actuated microstructures J. Sensors Actuators A 112 155-161