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Volumn 77, Issue 7, 2007, Pages 485-502

Electromechanical coupled nonlinear dynamics for microbeams

Author keywords

Electromechanical coupled; MEMS; Microbeam; Nonlinear dynamics; Vibration

Indexed keywords

DYNAMIC RESPONSE; ELECTROMECHANICAL COUPLING; NATURAL FREQUENCIES; PARAMETER ESTIMATION; PERTURBATION TECHNIQUES; VIBRATION ANALYSIS;

EID: 34249742014     PISSN: 09391533     EISSN: 14320681     Source Type: Journal    
DOI: 10.1007/s00419-007-0110-8     Document Type: Article
Times cited : (20)

References (9)
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    • Bao, Z., Mukherjee, S.: Electrostatic BEM for MEMS with thin conducting plates and shells. Eng. anal. bound, elem. 28, 1427-1435 (2004)
    • (2004) Eng. anal. bound, elem , vol.28 , pp. 1427-1435
    • Bao, Z.1    Mukherjee, S.2
  • 4
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    • Nonlinear vibrations of beams strings plates and membranes without initial tension
    • Bao, Z., Mukherjee, S., Roman, M., Aubry, N.: Nonlinear vibrations of beams strings plates and membranes without initial tension. ASME. J. Appl. Mech. 71, 551-559 (2004)
    • (2004) ASME. J. Appl. Mech , vol.71 , pp. 551-559
    • Bao, Z.1    Mukherjee, S.2    Roman, M.3    Aubry, N.4
  • 5
    • 0026366616 scopus 로고    scopus 로고
    • Greiff, P., Boxenhorn, B., King, T., Niles, L.: Silicon monolithic micromechanical gyroscope. In: Technical Digest, 6th International Conference Solid-State Sensors and Actuators (Transducers 91), pp. 966-968. San Francisco, CA, USA, pp. 24-28 June (1991)
    • Greiff, P., Boxenhorn, B., King, T., Niles, L.: Silicon monolithic micromechanical gyroscope. In: Technical Digest, 6th International Conference Solid-State Sensors and Actuators (Transducers 91), pp. 966-968. San Francisco, CA, USA, pp. 24-28 June (1991)
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    • Maenaka, K., Shiozawa, T.: Silicon rate sensor using anisotropic etching technology. Technical Digest, 7th International Conference Solid-State Sensors and Actuators (Transducers 93), pp. 642-645. Yokohama, Japan, pp. 7-10 June (1993)
    • Maenaka, K., Shiozawa, T.: Silicon rate sensor using anisotropic etching technology. Technical Digest, 7th International Conference Solid-State Sensors and Actuators (Transducers 93), pp. 642-645. Yokohama, Japan, pp. 7-10 June (1993)
  • 8
    • 34249686403 scopus 로고    scopus 로고
    • Putty, M.W., Najafi, K.: A micro machined vibrating ring gyroscope. Technical Digest, 7th International Conference Solid-State Sensors and Actuators Workshop, pp. 213-220. Hilton Head Island, SC, USA, June (1994) (4-7:ring)
    • Putty, M.W., Najafi, K.: A micro machined vibrating ring gyroscope. Technical Digest, 7th International Conference Solid-State Sensors and Actuators Workshop, pp. 213-220. Hilton Head Island, SC, USA, June (1994) (4-7:ring)
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    • AC transfer function of electrostatic capacitive sensors based on the 1-D equivalent model: Application to silicon microphones
    • Nadal-Guardia, R., Brosa, A.M., Dehe, A.: AC transfer function of electrostatic capacitive sensors based on the 1-D equivalent model: application to silicon microphones. J. Microelectromechan. Syst. 12(6), 972-978 (2003)
    • (2003) J. Microelectromechan. Syst , vol.12 , Issue.6 , pp. 972-978
    • Nadal-Guardia, R.1    Brosa, A.M.2    Dehe, A.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.